K
Katsuhiko Kubota
Researcher at Toshiba
Publications - 1
Citations - 46
Katsuhiko Kubota is an academic researcher from Toshiba. The author has contributed to research in topics: Wafer dicing & Isotropic etching. The author has an hindex of 1, co-authored 1 publications receiving 46 citations.
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Patent
Method for dicing semiconductor substrates using a laser scribing and dual etch process
Haruyuki Goto,Katsuhiko Kubota +1 more
TL;DR: In this article, the silicon substrate in which mesa semiconductor elements are formed is scribed along dicing lines by a laser and the resolidified silicon, which failed to vaporize during scribing, is etched away by sodium hydroxide solution.