An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

The silicon carbide semiconductor device includes a substrate, a drift layer, a base region, a source region, a trench, a gate insulating layer, a gate electrode, a source electrode, a drain electrode, and a deep layer. The deep layer is disposed under the base region and is located to a depth deeper than the trench. The deep layer is divided into a plurality of portions in a direction that crosses a longitudinal direction of the trench. The portions include a group of portions disposed at positions corresponding to the trench and arranged at equal intervals in the longitudinal direction of the trench. The group of portions surrounds corners of a bottom of the trench.

Silicon carbide semiconductor device and method of manufacturing the same

This silicon-carbide semiconductor device (101) has a silicon-carbide substrate (10), a main electrode (52), a first barrier layer (70a), and a wiring layer (60). The main electrode (52) is provided directly on top of the silicon-carbide substrate (10). The first barrier layer (70a) is provided on top of the main electrode (52) and is made from a conductive material that does not contain aluminum. The wiring layer (60) is provided on top of the first barrier layer (70a), is isolated from the main electrode (52) by the first barrier layer (70a), and is made from a material that does contain aluminum.

Silicon carbide semiconductor device

A silicon carbide semiconductor device includes: a semiconductor substrate having a silicon carbide substrate, a first semiconductor layer, a second semiconductor layer, and a third semiconductor layer; a trench penetrating the second and the third semiconductor layers to reach the first semiconductor layer; a channel layer on a sidewall and a bottom of the trench; an oxide film on the channel layer; a gate electrode on the oxide film; a first electrode connecting to the third semiconductor layer; and a second electrode connecting to the silicon carbide substrate. A position of a boundary between the first semiconductor layer and the second semiconductor layer is disposed lower than an utmost lowest position of the oxide film.

Silicon carbide semiconductor device and method for manufacturing the same

This invention discloses a semiconductor power device that includes a plurality of power transistor cells surrounded by a trench opened in a semiconductor substrate. At least one active cell further includes a trenched source contact opened between the trenches wherein the trenched source contact opened through a source region into a body region for electrically connecting the source region to a source metal disposed on top of an insulation layer wherein a trench bottom surface of the trenched source contact further covered with a conductive material to function as an integrated Schottky barrier diode in said active cell. A shielding structure is disposed at the bottom and insulated from the trenched gate to provide shielding effect for both the trenched gate and the Schottky diode.

Shielded gate trench (SGT) MOSFET cells implemented with a schottky source contact

In a semiconductor device having a trench type insulated gate structure, in the case where a drift layer (2) of an n- conduction type has a high carrier concentration, when a high voltage is applied between a drain and a source in such a manner that a channel is not formed, the electric field strength of an insulator layer (9) below the trench type insulated gate is increased, thus causing breakdown The withstand voltage of the semiconductor device is limited by the breakdown of the insulator layer (9), and it is difficult to realize high withstand voltage Thus, a field relaxation semiconductor region (1) of a conduction type opposite to the conduction type of the drift layer (2) is formed within the drift layer (2) below the insulator layer (9) in the trench of the trench type insulated gate semiconductor device Also, the thickness of a bottom portion of the insulator layer (9) provided in the trench of the trench type insulated gate semiconductor device is made significantly greater than the thickness of a lateral portion thereof

Katsunori Asano

Papers

Insulated gate semiconductor device