K
Kazuhide Hasebe
Researcher at Air Products & Chemicals
Publications - 1
Citations - 215
Kazuhide Hasebe is an academic researcher from Air Products & Chemicals. The author has contributed to research in topics: Ion plating & Plasma processing. The author has an hindex of 1, co-authored 1 publications receiving 215 citations.
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Patent
Low temperature deposition of silicon-containing films
Liu Yang,Xinjian Lei,Bing Han,Manchao Xiao,Eugene Joseph Karwacki,Kazuhide Hasebe,Masanobu Matsunaga,Masato Yonezawa,Hansong Cheng +8 more
TL;DR: In this paper, the method of forming silicon nitride, silicon oxynitride, carbon-doped silicon oxide, silicon oxide and carbon-deposition of carbon dioxide at low deposition temperatures is described.