An electrostatic chuck device includes an electrostatic chuck part that has an upper surface as a placement surface for placing a plate-shaped sample and has an internal electrode for electrostatic attraction built therein; and a cooling base part that cools the electrostatic chuck part. The electrostatic chuck part and the cooling base part are integrally adhered to each other via an adhesive layer. An insulator having a double pipe structure including an insulator and an insulator provided coaxially with an outer peripheral portion of the insulator is provided in a cooling gas hole, formed in the electrostatic chuck part and the cooling base part, so as to cover an exposed surface of the adhesive layer on the cooling gas hole side.

Electrostatic chuck device

The honeycomb structured body of the present invention is a honeycomb structured body in which a plurality of porous ceramic members are combined with one another through an adhesive layer, each of the porous ceramic members having a plurality of cells which are allowed to penetrate in a longitudinal direction with a wall portion therebetween and either one end of which is sealed, with a catalyst supporting layer being adhered to the wall portion, wherein an average pore diameter of the porous ceramic member is larger than an average particle diameter of particles constituting the catalyst supporting layer, and when a pore diameter distribution of the porous ceramic member and a particle diameter distribution of particles constituting the catalyst supporting layer are drawn with the pore diameter and the particle diameter being on the same axis, a pore volume in an overlapped area of both the distributions is about 10% or less to the entire pore volume of the porous ceramic member.

Honeycomb structured body

A stacked piezoelectric device 1 including a ceramic laminate formed by laminating piezoelectric ceramic layers and inner electrode layers alternately and a pair of side electrodes. The inner electrode layers 13 and 14 have inner electrode portions 131 and 141 and the recessed portions 132 and 142. The ceramic laminate 15 has the stress absorbing portions 11 and 12. A recessed distance of one of two of the recessed portions 132 and 142 which interleave the stress absorbing portions 11 and 12 therebetween which is located on the same side surface as the stress absorbing portion 11 or 12 is greater than the depth of the stress absorbing portion 11 and 12.

Laminated piezoelectric element

The present disclosure is directed to integrated injector/igniters providing efficient injection, ignition, and complete combustion of various types of fuels. One example of such an injectors/igniter can include a body having a base portion opposite a nozzle portion, and a fuel passageway extending from the base portion to the nozzle portion. A force generator and a first valve are carried by the base portion. The first valve is movable in response to actuation from the force generator to move between closed and open positions. The injector/igniter also includes a second valve at the nozzle portion that is deformable in response to pressure in the fuel passageway to deform between a closed position and an open position.

Integrated fuel injectors and igniters and associated methods of use and manufacture

A system for safe storage and efficient utilization of a variety of fuel selections that range in composition and phase from cryogenic mixtures of solids and liquids to elevated temperature gases is provided for unique applications with various types of heat engines and fuel cells including hybridized combinations.

Multifuel storage, metering and ignition system

A piezoelectric element and an injector using the same piezoelectric element are disclosed, which are so high in reliability as not to be shorted even in a high humidity environment, are small in size, are low in cost and are high in heat radiation capability. The piezoelectric element comprises a ceramic laminate (10) including a plurality of ceramic layers of a piezoelectric ceramic (11) and a plurality of internal electrode layers (21, 22), stacked alternately. At least an organic insulating layer (41) of an organic material is formed on at least a part of the surface of the ceramic laminate (10), and at least an inorganic insulating layer (42) of an inorganic material is formed on the organic insulating layer (41).

Piezoelectric element and injector using the same

Offenbart sind ein piezoelektrisches Element (1) und eine mit diesem piezoelektrischen Element versehene Einspritzduse, die eine so hohe Zuverlassigkeit haben, dass diese sich auch in einer stark feuchten Umgebung nicht verschlechtert, die eine geringe Grose haben, mit geringen Kosten verbunden sind und ein hohes Warmeabstrahlvermogen aufweisen. Das piezoelektrische Element (1) umfasst eine Keramikaufschichtung (10), die abwechselnd ubereinander gestapelt mehrere Keramikschichten (11) aus piezoelektrischer Keramik und mehrere Innenelektrodenschichten (21, 22) enthalt. Auf zumindest einem Teil der Oberflache der Keramikaufschichtung (10) ist mindestens eine organische Isolationsschicht (41) aus organischem Material ausgebildet, und auf der organischen Isolationsschicht (41) ist mindestens eine anorganische Isolationsschicht (42) aus anorganischem Material ausgebildet.

Piezoelektrisches Element und damit versehene Einspritzdüse

In a method of manufacturing an exhaust gas purifying filter that captures and purifies particulates involved in an exhaust gas emitted from an internal combustion engine, a honeycomb mold body of a desired length is firstly made by an extrusion molding step. In a sealing and enlarging step, tapered front parts of a multi-taper jig are inserted into the corresponding openings of the cells. The multi-taper jig is then oscillatory moved in a direction perpendicular to a longitudinal length of the ceramic mold body while heating the partition walls forming the cells, so that the opening of one cell is closed and sealed completely and the opening of the adjacent cell is enlarged in area. Finally, the honeycomb mold body is burned.

Manufacturing method of exhaust gas purifying filter

A high reliability ceramic laminate suppresses delamination and cracks Wide ceramic sheets are temporarily laminated by heat and pressure to form a pre-laminate which is cut to form a unit body Unit bodies are laminated to obtain a ceramic laminate Dewaxing removes not less than 90% of a binder resin before the ceramic laminate is sintered

Method of producing a ceramic laminate

Ein
laminiertes piezoelektrisches Element (1) mit einem durch abwechselnde
Lamination einer Vielzahl von piezoelektrischen Schichten (11) und
einer Vielzahl von internen Elektrodenschichten (21) gebildeten keramischen
Laminat (10). Eine mit der ersten Seitenflachenelektrode (31) versehene
Seitenflache
(101) ist ferner mit ersten ausgesparten Nutenbereichen (41), welche
die Enden der zweiten internen Elektroden (22) in den Bodenbereichen
(410) hiervon in Kontakt bringt, versehen, und eine mit der zweiten
Seitenflachenelektrode
(32) versehene Seitenflache
(102) ist ferner mit zweiten ausgesparten Nutenbereichen (42), welche
die Enden der ersten internen Elektrodenn (21) in den Bodenbereichen
in Kontakt bringt, versehen. Die ersten ausgesparten Nutenbereiche
(41) und die zweiten ausgesparten Nutenbereiche (42) sind mit einem
isolierenden Fullmaterial
(5) mit elektrisch isolierender Eigenschaft so gefullt, um
die Enden der zweiten internen Elektroden (22) und die Enden der
ersten internen Elektroden (21) zu bedecken. Das isolierende Fullmaterial (5)
umfast
ein isolierendes Harz (50) mit elektrisch isolierender Eigenschaft
und anorganische Teilchen (51) eines in dem isolierenden Harz (50)
enthaltenen anorganischen Materials.

Kazuhide Sato

Papers

Piezoelectric element and injector using the same

Piezoelektrisches Element und damit versehene Einspritzdüse

Manufacturing method of exhaust gas purifying filter

Method of producing a ceramic laminate

Laminiertes piezoelektrisches Element