A method for dressing a tool used for a method for machining an internally toothed gear, the method for machining an internally toothed gear being capable of, even if the grindstone of the tool has a regenerated grinding surface, machining with stable accuracy the internally toothed gear to be machined. A method for dressing a screw-like tool, configured for dressing the screw-like tool by meshing an internally toothed gear-like dressing gear (14), which is rotatable about the dressing gear rotation axis (C2), with the barrel-shaped, screw-like grindstone (11) which has a diameter gradually increasing from both ends thereof in the axial direction thereof toward the intermediate section in the axial direction thereof and which is used for machining an internally toothed gear to be machined. The outer diameter of the screw-like grindstone (11) after dressing is estimated before the dressing, the angle (Σ2) of intersection between the dressing gear rotation axis (C2) and the screw-like tool rotation axis (B1) of the screw-like grindstone (11) is set on the basis of the estimated outer diameter of the screw-like grindstone (11) after dressing, and dressing is performed with the dressing gear (14) and the screw-like grindstone (11) meshed with each other at the set angle (Σ2) of intersection between the axes.

Method for machining internally toothed gear and method for dressing tool used for same

A platen having a patterned upper surface for supporting a polishing material in a chemical mechanical polishing system is provided. In one embodiment, a platen for supporting a polishing material in a chemical mechanical polishing system includes a body adapted to support a polishing material during processing and having a substantially rigid non-planar upper support surface for supporting the polishing material during polishing.

Platen with patterned surface for chemical mechanical polishing

A precision polishing element polishes a general surface, such as an aspheric optical surface. A compliant polishing member is mounted to a substantially rigid support member. The compliant polishing member has plurality of spaced compliant polishing portions for engaging the surface to be polished and trapping polishing fluid between the interface of the surface to be polished and nearest polishing portion in contact with the surface. An important advantage derived from the polishing element of the invention is that it enables the polishing fluid to evenly distribute across the surface to be polished.

Compliant polishing element and method of manufacturing the same

A highly accurate, long-life grindstone for shaping a gear and a method of fabricating the grindstone, without depending on the accuracy of form of a base metal and without using a special grinding machine or a special lapping machine, are disclosed. A super-abrasive layer (29) of a predetermined thickness is fixedly attached on the outer periphery of a body portion (24) of the base metal (23) formed in a cylinder solid. The super-abrasive layer (29) is metal-bonded, and has the outer periphery thereof formed with a toothed portion (31) in the shape of the teeth of an external gear by electric discharge machining.

Kazuki Kataoka

Papers

Gear-shaping grindstone and method of fabricating the same