An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

Interferometric modulation of radiation

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

Photonic mems and structures

One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.

A microelectromechanical systems device and method for fabricating same

The invention provides a microfabrication process which may be used to manufacture a MEMS device. The process comprises depositing one or a stack of layers on a base layer, said one layer or an uppermost layer in said stack of layers being a sacrificial layer; patterning said one or a stack of layers to provide at least one aperture therethrough through which said base layer is exposed; depositing a photosensitive layer over said one or a stack of layers; and passing light through said at least one aperture to expose said photosensitive layer.

A method for fabricating a structure for a microelectromechanical systems (mems) device

An interferometric modulator manufactured according to a particular set of processing parameters may have a non-zero offset voltage. A process has been developed for modifying the processing parameters to shift the non-zero offset voltage closer to zero. For example, the process may involve identifying a set of processing parameters for manufacturing an interferometric modulator that results in a non-zero offset voltage for the interferometric modulator. The set of processing parameters may then be modified to shift the non-zero offset voltage closer to zero. For example, modifying the set of processing parameters may involve modifying one or more deposition parameters used to make the interferometric modulator, applying a current (e.g., a counteracting current) to the interferometric modulator, and/or annealing the interferometric modulator. Interferometric modulators made according to the set of modified processing parameters may have improved performance and/or simpler drive schemes.

Process for modifying offset voltage characteristics of an interferometric modulator

A variable interferometric device comprising a Fabry-Perot interferometer composed of a pair of reflecting substances facing each other with a space therebetween formed by spacers and a means for deforming at least one of the reflecting substances constituting said Fabry-Perot interferometer to thereby change the interferometric characteristics of said Fabry-Perot interferometer. Moreover, an optical sensor comprising a light source, a first Fabry-Perot interferometric device, the interferometric characteristics of which vary with the physical quantity of the object to be measured, a light-dividing means for dividing the light from the light source into a first light beam and a second light beam, a second Fabry-Perot interferometric device functioning as a reference standard, the operational conditions of which are set at fixed values, a first photodetector for receiving the first light beam from said light-dividing means through the second Fabry-Perot interferometric device, a second photodetector for receiving the second light beam from said light-dividing means through the second Fabry-Perot interferometric device, and a signal-processing circuit for comparing the output signal from the first photodetector with the output signal from the second photodetector to thereby determine the physical quantity of the object to be measured.

Variable interferometric device and a process for the production of the same

PURPOSE: To manufacture a uniform characteristic ink jet printer head at a low cost by a method wherein a silicone substrate having a groove and a recessed part which are interconnected with each other is provided as a structure part, the groove constitutes the structure part of a nozzle, the recessed part constitutes the structure part of an ink chamber, and a vibration plate is structured by a bottom surface part of the recessed part. CONSTITUTION: For instance, a plate is connected to a side wherein a groove 2 and a recessed part of a silicone substrate 1 are formed, an ink chamber 3 being constructed by the recessed part, and a nozzle is constructed by the groove part. Then, a piezoelectric element 7 or the like is connected to a bottom surface part of the recessed part, and the bottom surface part of the recessed part operates as a vibration plate 5. It is not required that the vibration plate is independently connected thereto. Further, the silicone substrate is easily finely worked by etching and becomes capable of being worked with excellent precision. Therefore, though a thickness of the vibration plate is thinned, treating on manufacture is simple, and an ink jet printer can be manufactured by good productivity at a low cost. COPYRIGHT: (C)1991,JPO&Japio

Ink-jet printer head and its manufacture

A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.

Moisture-sensitive device

An optical sensor

A moisture sensitive material prepared by cross-linking cellulose acetate butyrate with at least one compound selected from the group consisting of compounds containing two or more isocyanate groups; copmpounds containing two or more epoxy groups; compounds containing two or more carboxyl groups; and acid anhydrides of carboxylic acids.

Kazutaka Uda

Papers

Variable interferometric device and a process for the production of the same

Ink-jet printer head and its manufacture

Moisture-sensitive device

An optical sensor

Moisture sensor containing cellulose acetate butyrate