An object is to provide a method for manufacturing a semiconductor device, in which the number of photolithography steps can be reduced, the manufacturing process can be simplified, and manufacturing can be performed with high yield at low cost A method for manufacturing a semiconductor device includes the following steps: forming a semiconductor film; irradiating a laser beam by passing the laser beam through a photomask including a shield for shielding the laser beam; subliming a region which has been irradiated with the laser beam through a region in which the shield is not formed in the photomask in the semiconductor film; forming an island-shaped semiconductor film in such a way that a region which is not irradiated with the laser beam is not sublimed because it is a region in which the shield is formed in the photomask; forming a first electrode which is one of a source electrode and a drain electrode and a second electrode which is the other one of the source electrode and the drain electrode; forming a gate insulating film; and forming a gate electrode over the gate insulating film

Method for Manufacturing Semiconductor Device

A photomask blank is provided comprising an etch stop film which is disposed on a transparent substrate and is resistant to fluorine dry etching and removable by chlorine dry etching, a light-shielding film disposed on the etch stop film and including at least one layer composed of a transition metal/silicon material, and an antireflective film disposed on the light-shielding film. When the light-shielding film is dry etched to form a pattern, pattern size variation arising from pattern density dependency is reduced, so that a photomask is produced at a high accuracy.

Photomask blank and photomask

An illumination device (10) for simulating neon lighting comprising a plurality of space point light sources (24) positioned adjacent a lateral light receiving surface (15) of a substantially rod-like waveguide (12) made of a material that preferentially scatters light entering the light receiving surface such that the light intensity pattern exiting a lateral light emitting surface (13) of the waveguide (12) has a substantially uniform light intensity pattern.

Illumination device for simulation of neon lighting

In an optical transmission tube comprising a tubular cladding and a core within the cladding having a higher index of refraction than the cladding, a strip-shaped reflecting layer is longitudinally extended between the cladding and the core. Light passing through the core is reflected and scattered by the reflecting layer to emerge from the tube through an area of the outer surface of the cladding opposed to the reflecting layer. The optical transmission tube is prepared by dispersing scattering particles in a monomer solution; filling a tubular cladding with the monomer solution; resting the cladding horizontally for allowing the scattering particles to settle on a lower inner surface of the cladding; and thereafter, causing the monomer solution to polymerize and solidify within the cladding.

Optical transmission tube, making method, and linear illuminant system

Illuminators include transparent light emitting members (1) having a pattern of rounded shallow notches or grooves (3) in one or more surfaces of the members (1) for causing internally reflected light (5) to be emitted from the members (1). The notches or grooves (3) may be cut using a circular cutting tool. The relative speed of the cutting tool and feed rate of the cutting tool relative to the members (1) may be controlled to produce a roughened surface on the notches or grooves (3).

Transparent light emitting members and method of manufacture

A light-illuminating rod comprises a flexible rod member formed from a light piping plastic material and a light diffusible reflective film which is fixedly bonded to part of the outer periphery of the rod member along the longitudinal direction thereof. The light diffusible reflective film comprises a light-transmittable polymer and light diffusible reflective particles dispersed in the polymer. The light-transmittable polymer contains from 10 to 100% by weight of an adhesive polymer based on the total amount of the light-transmittable polymer. The light-transmittable polymer further contains from 2 to 90% by weight of a dispersible polymer having hydrophilic functional groups within the molecule based on the total amount of the light-transmittable polymer. In one embodiment, the light diffusible reflective particles contain from 10 to 100% by weight of an inorganic material based on the total amount of the light diffusible reflective particles.

Light-illuminating rods

A light fiber comprising (a) a tubular clad having a predetermined length and (b) a solid core formed by reacting a filler material with which the clad is filled, the clad and the core being closely contacted with each other by shrinkage of the clad, characterized in that: the clad is expandable under pressure, shrinkage of the clad is initiated before the completion of the reaction of the filler material and is carried out in conformity with volume reduction of the core, which accompanies the reaction of the filler material, and the number of air gap between the clad and the core, which is measured per length of 10 m, is 3 or less.

Light fibers and methods for producing the same

A light fiber of directional side light extraction type capable of keeping the sectional shape as desired, reducing the undesirable light leakage to the outside through the light diffusive and reflective portion and extracting a highly directional and a highly bright light, and a process for manufacturing the same Said object can be attained by co-extruding a resinous material only, and a material obtained by light scattering fine particles with a resinous material to disperse them therein so as to form a light diffusive and reflective film in a desired portion at least on the inner periphery of the clad

Light fiber and a method for producing the same

PURPOSE: To increase the resolution and to improve condensing characteristics and image transfer function without decreasing qualities in an image and information by partially forming a light-shielding film in the center part of a lens plane including the optical axes of plural microlenses on a transparent substrate. CONSTITUTION: A photosensitive resin 2 is applied on a transparent substrate 3, exposed to light through a photomask 1, and developed to form plural photosensitive resin patterns 4. These patterns 4 are fused or softened by heating to form convex resin microlenses 5. Then the three-dimensional shape of these convex resin microlenses 5 is transferred to the transparent substrate by dry etching to form a microlens array 6. Then a light-shielding film 24 is formed in the center part of the lens plane including the optical axes on the back surface of the microlens array 23 so that the film 24 partially covers the lens plane. The peripheral shape of the light-shielding film 24 is preferably almost same as that of the aperture of the microlens (the cross section perpendicular to the optical axis of the lens), and the ratio of diameters of the microlens to the light-shielding part is preferably 0.05-0.90. COPYRIGHT: (C)1996,JPO

Microlens array integrated with light-shielding part and its production

PROBLEM TO BE SOLVED: To provide a side face emitting type optical fiber which can emit light of high luminance at a large angle of visual field SOLUTION: This optical fiber 10 consists of a center core 1 and a clad 2 around the core The clad consists of a light diffusing layer 3 and protective layer 4 to cover the light diffusing layer The light diffusing layer 3 contains a light diffusing part comprised of a light diffusing material containing a polymer as a binder having lower refractive index than that of the core, and is formed to 1 to 300 μm thickness around and tightly adhered to the core The protective layer 4 consists of a light transmissive resin material and is integrally molded with the light-diffusing layer

Kenji Matsumoto

Papers

Light-illuminating rods

Light fibers and methods for producing the same

Light fiber and a method for producing the same

Microlens array integrated with light-shielding part and its production

Optical fiber and its production