Apparatus and method for determining at least one parameter, e.g., concentration, of at least one analyte, e.g., urea, of a biological sample, e.g., urine. A biological sample particularly suitable for the apparatus and method of this invention is urine. In general, spectroscopic measurements can be used to quantify the concentrations of one or more analytes in a biological sample. In order to obtain concentration values of certain analytes, such as hemoglobin and bilirubin, visible light absorption spectroscopy can be used. In order to obtain concentration values of other analytes, such as urea, creatinine, glucose, ketones, and protein, infrared light absorption spectroscopy can be used. The apparatus and method of this invention utilize one or more mathematical techniques to improve the accuracy of measurement of parameters of analytes in a biological sample. The invention also provides an apparatus and method for measuring the refractive index of a sample of biological fluid while making spectroscopic measurements substantially simultaneously.

Reagentless analysis of biological samples

The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

Method and apparatus for monitoring plasma processing operations

A method and apparatus is provided for detecting a faulty sensor within a process control system having a set of sensors, each of which produces an associated sensor output signal. The method and apparatus produce a set of sensor estimate signals from the sensor output signals using principal component analysis and then determine a validity index for each of the sensors as a ratio of two residuals, wherein each of the residuals represents a different measure of the difference between the sensor output signals and the sensor estimate signals. The determined validity indexes are then used to detect a failure of one of the sensors and/or to identify which one of the sensors has failed.

Method and apparatus for detecting and identifying faulty sensors in a process

A method of analysis, analysis system, program product, apparatus, and method of supplying analysis of value incorporating the use of at least one data acquisition device, a central processor, and a communication link that is connectable between the data acquisition device and the central processor. The central processor is loaded with multivariate calibration models developed for predicting values for various properties of interest, wherein the calibration models are capable of compensating for variations in an effectively comprehensive set of measurement conditions and secondary material characteristics. As so configured, the calibration models can compensate for instrument variance without instrument-specific calibration transfer. Measurement results generated by the central processor can be transmitted to an output device of a user interface.

On-site analysis system with central processor and method of analyzing

A method is provided for building improved calibration models or for improving modifications to these models or validation of the models used in the non-invasive spectroscopic measurement of an analyte or attribute of tissue. The method uses a matched reference sample and measurement of that sample to ensure that the correct relationship between the spectra and analyte is made during the model building, modification or calibration process. A matched reference sample is one in which the analyte of interest or attribute of interest in the reference sample is representative of the analyte or attribute at the site being non-invasively sampled or the agreement between the reference concentration and the non-invasively sampled concentration is clinically significant.

Apparatus and method for non-invasive spectroscopic measurement of analytes in tissue using a matched reference analyte

An improved method is provided for determining when a set of multivariate data (such as a chromatogram or a spectrum) is an outlier. The method involves using a procedure such as Principal Component Analysis to create a model describing a calibration set of spectra or chromatograms which is known to be normal, and to create residuals describing the portion of a particular spectrum or chromatogram which is not described by the model. The improvement comprises using an average residual spectrum calculated for the calibration set, rather than the origin of the model as a reference point for comparing a spectrum or chromatogram obtained from an unknown sample. The present invention also includes separating a complex set of data into various sub-parts such as sub-chromatograms or sub-spectra, so that outliers in any sub-part can be more readily detected. In one particular embodiment, the invention is directed towards a method for dividing a chromatogram into the sub-parts of peak information, baseline shape, baseline offset, and noise.

Method for interpreting complex data and detecting abnormal instrumentor process behavior

A method of creating a library of standardized spectral data and identifying a sample by searching the standardized library for a match with the sample spectrum. The method entails determining and applying a transfer function which equalizes instrument bias between instruments and within the same instruments over time. A transfer function is specific to a particular instrument, and is based on the relationship between a reference spectrum of a standard as stored in a library and a spectrum of the standard obtained on the particular instrument of interest. This method provides enhanced library searching capabilities.

Method of creating standardized spectral libraries for enhanced library searching

A method for sorting a plurality of diverse objects into groups, each such object being made predominately from at least polyethylene terephthalate and polystyrene and at least two of polyvinyl chloride, polyethylene and polypropylene, the groups consisting at least of objects of like type of polymer identified to be polyethylene terephthalate and polystyrene and at least two of polyvinyl chloride, polyethylene and polypropylene. The method includes three steps. The first step is to irradiate the objects to be sorted with near-infrared radiation. The second step is to measure the diffuse reflectance of the irradiated objects in the near-infrared region to identify the objects as to the type of polymer used to make them. The third step is to direct the objects to their respective groups according to the measurement and identification of the second step.

Method for sorting used plastic containers and the like

A method of correcting for instrumental changes that influence the spectral response of a mass spectrometer over time. The method entails determining and applying a transfer function which equalizes instrument bias between mass spectrometers and within the same mass spectrometer over time. A transfer function is specific to a particular mass spectrometer, and is based on the relationship between a reference spectrum of a standard as stored in a library and a spectrum of the standard obtained on the particular mass spectrometer of interest. This method facilitates and simplifies recalibration, provides enhanced library searching capabilities for mass spectrometry, and may permit concentration determination from mass spectral data without the need to recalibrate an instrument with multiple standards.

Kenneth R Beebe

Papers

Method for interpreting complex data and detecting abnormal instrumentor process behavior

Method of creating standardized spectral libraries for enhanced library searching

Method for sorting used plastic containers and the like

Method of standardizing data obtained through mass spectrometry

Improved method for interpreting complex data and detecting abnormal instrument or process behavior.