A piezoelectric element includes a first electrode, a piezoelectric layer formed of a first piezoelectric film which is formed on the first electrode and which includes potassium, sodium, and niobium and a plurality of second piezoelectric films which are formed on the first piezoelectric film and which include potassium, sodium, and niobium, and a second electrode formed on the piezoelectric layer, in which the piezoelectric layer is a stack of a plurality of piezoelectric films, the first piezoelectric film has a thickness of 30 nm to 70 nm, a concentration of sodium in each of the piezoelectric films is along a gradient in the film thickness direction with the first electrode side being high and the second electrode side being low.

Piezoelectric element, piezoelectric element application device, and method of manufacturing piezoelectric element

A piezoelectric element includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from compound oxide which has a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. The piezoelectric layer has a peak derived from a (200) plane and a peak derived from a (002) plane in an X-ray diffraction pattern obtained by θ-2θ measurement.

Piezoelectric element and piezoelectric element applied device

The invention provides a composite-cavity piezo-electric ink-jet printing head and a manufacturing method thereof. The ink-jet printing head comprises an upper piezo-electric actuator, a lower piezo-electric actuator, an upper vibration plate, a lower vibration plate, and a cavity structure layer. The cavity structure layer consists of a plurality of cavity units; and each cavity unit includes an upper cavity unit and a lower cavity unit that are arranged at the same vertical cross section. The An ink inlet communicated with the upper cavity unit and the lower cavity unit is formed in the upper vibration plate; and a plurality of spraying orifices communicated with the upper cavity unit and the lower cavity unit correspondingly are formed in the lower vibration plate. The upper piezo-electric actuator is fixed at the upper vibration plate and corresponds to the upper cavity unit. And the lower piezo-electric actuator corresponding to the lower cavity unit is fixed at the lower vibration plate. According to the invention, the manufacturing process is simplified; the cavity number is increased; and the resolution is enhanced. Meanwhile, piezoelectric ceramic films and upper electrodes of the piezo-electric actuators are manufactured by using a silk-screen printing process, so that etching of the piezoelectric ceramic films and upper electrodes can be avoided and thus the manufacturing process can be simplified.

Composite-cavity piezo-electric ink-jet printing head and manufacturing method thereof

The present invention relates to a composition comprising one or more perovskite precursors dissolved in a mixture of solvents comprising: 
i. one or more polar aprotic solvents, each selected in such a way that it can, when used in absence of other components, dissolve said one or more perovskite precursors, 
ii. one or more linear alcohols of general formula C n H 2n+1 OH, wherein n is from 1 to 12, and 
iii. optionally, one or more acids 
wherein the polar aprotic solvent or mixture of polar aprotic solvents represent between 50 and 95 vol% of the mixture of solvents.

Multi-solvent perovskite composition

A piezoelectric element includes a first and a second electrode, a piezoelectric layer between the first electrode and the second electrode, and an orientation control layer between the first electrode and the piezoelectric layer. The orientation control layer contains perovskite complex oxide containing potassium, sodium, calcium, and niobium and preferentially oriented in the (100) plane.

Piezoelectric element and device including the same

A piezoelectric element includes a first electrode that is formed on a substrate, a piezoelectric layer that is formed on the first electrode and includes an ABO 3 type complex oxide of the perovskite structure expressed by Formula (1) described below, and a second electrode that is formed on the piezoelectric layer, in which the piezoelectric layer is made of a polycrystal which is preferentially oriented to a (100) plane, and has a thickness of 50 nm or more and 2000 nm or less, and in the piezoelectric layer, a diffraction peak position (2θ) of an X-ray derived from the (100) plane of the piezoelectric layer is 22.51° or more and 22.95° or less. (Kx, Na 1-x )NbO 3 ···     (1)

Piezoelectric element, piezoelectric element applying device, and manufacturing method of piezoelectric element

A piezoelectric element has, from a substrate side, a first electrode, a piezoelectric layer containing a composite oxide of an ABO3 type perovskite structure containing Mg, and a second electrode, which are laminated, in which the first electrode includes a diffusion suppressing layer which suppresses diffusion of the Mg and a diffusion layer which diffuses the Mg as compared with the diffusion suppressing layer, and the diffusion suppressing layer is provided on the substrate side relative to the diffusion layer.

Piezoelectric element, method for manufacturing the same, and piezoelectric element-applied device

A piezoelectric element includes a first electrode; a seed layer comprised of a composite oxide having a perovskite structure and preferentially oriented to a (100) plane, the seed layer including bismuth in an A site and including iron and titanium in a B site, the seed layer having a thickness of less than 20 nm; a piezoelectric layer provided on the seed layer, the piezoelectric layer consisting of a piezoelectric material having a perovskite structure and preferentially oriented to a (100) plane; and a second electrode provided on the piezoelectric layer.

Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and sensor

A piezoelectric actuator includes a vibration portion, a support portion that is integrally configured with the vibration portion and supports the vibration portion, and a piezoelectric element that is disposed on the vibration portion. The piezoelectric element includes a piezoelectric film including columnar crystal grains extending in a thickness direction. When a thickness of the piezoelectric film is referred to as T [μm] and an average diameter of the crystal grains in the width direction is referred to as D [μm], T/D is within a range of 10 to 100. The thickness T of the piezoelectric film is larger than or equal to 2 μm. A standard deviation of diameters of the crystal grains in the width direction is less than or equal to 1.8 μm.

Piezoelectric actuator, piezoelectric drive device, robot, electronic component transport apparatus, and printer

A piezoelectric element includes: a substrate; a first electrode which is disposed on the substrate; a piezoelectric body layer which is disposed on the first electrode, which has a plurality of layers configured to contain a piezoelectric body material, and in which the total thickness of the plurality of layers is within a range of 1.6 μm to 10 μm; and an intermediate layer which is disposed on an interlayer of the piezoelectric body layer, and which is configured to contain titanium.

Kobayashi Tomokazu

Papers

Piezoelectric element, piezoelectric element applying device, and manufacturing method of piezoelectric element

Piezoelectric element, method for manufacturing the same, and piezoelectric element-applied device

Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and sensor

Piezoelectric actuator, piezoelectric drive device, robot, electronic component transport apparatus, and printer

Piezoelectric element, piezoelectric actuator, piezoelectric motor, robot, electronic component transporting apparatus, and printer