A light source device includes: a light emitting plate that has a plurality of segment regions including a transmissive portion that transmits light and a reflective portion on which a fluorescent substance layer; a light source that irradiates the fluorescent substance layer of the light emitting plate with the excitation light; a dichroic mirror that is disposed between the light source and the light emitting plate to transmit the excitation light and reflect fluorescent light from fluorescent substances of the fluorescent substance layer; and an optical device that condenses the excitation light transmitted by the transmissive portion of the light emitting plate and the fluorescent light reflected by the dichroic mirror on a single optical path to form a condensed light and radiate the condensed light toward the same direction.

Light source device and projector

A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

An exposure apparatus for emitting exposure light onto a substrate via a projection optical system and a liquid to expose the substrate includes a supply pipe which supplies the liquid; a recovery pipe which recovers the liquid; a connection pipe which connects the supply pipe and the recovery pipe; and a switching device which switches a flow path of the liquid so that when liquid supply is stopped, the liquid that has flowed into the supply pipe flows to the recovery pipe via the connection pipe. The apparatus may further include a temperature regulation apparatus connected to the supply pipe, which performs temperature regulation of the liquid supplied to the supply pipe, and has a rough temperature regulator which roughly regulates the temperature of the liquid, and a fine temperature regulator which is arranged between the rough temperature regulator and the supply pipe and performs fine regulation of this temperature.

Exposure apparatus, and device manufacturing method

An illumination device includes: a light source device adapted to emit an excitation light beam; and a rotating fluorescent plate having a single fluorescent layer adapted to convert a part or whole of the excitation light beam into a fluorescent light beam. The fluorescent light beam includes two or more colored light beams, and the single fluorescent layer is formed on a circular disk, which can be rotated by a motor, continuously along a circumferential direction of the circular disk.

Illumination device and projector

By doping an organic compound functioning as an electron donor (hereinafter referred to as donor molecules) into an organic compound layer contacting a cathode, donor levels can be formed between respective LUMO (lowest unoccupied molecular orbital) levels between the cathode and the organic compound layer, and therefore electrons can be injected from the cathode, and transmission of the injected electrons can be performed with good efficiency. Further, there are no problems such as excessive energy loss, deterioration of the organic compound layer itself, and the like accompanying electron movement, and therefore an increase in the electron injecting characteristics and a decrease in the driver voltage can both be achieved without depending on the work function of the cathode material.

Light Emitting Device

The present invention provides a micro-lens substrate wherein a higher contrast ratio can be obtained when used in a liquid crystal panel and the like. A micro-lens substrate includes a first substrate with concaves for microlenses having a plurality of first concaves and first alignment marks formed on a first glass substrate, a second substrate with concaves for microlenses having a plurality of second concaves and second alignment marks formed on a second glass substrate, a resin layer, microlenses comprised of double convex lenses formed of a resin filled in between the first and second concaves, and spacers.

System and method for providing a substrate having micro-lenses

An illuminator includes a (solid-state light source array) including a plurality of solid-state light sources, a light collecting system that collects light from the solid-state light source group at a predetermined light collection position, a collimator system disposed on the opposite side of the light collection position to the light collecting system and substantially parallelizing light from the light collecting system, and an integrator system that homogenizes the in-plane light intensity distribution of light from the collimator system. The illuminator further includes a transmissive diffusing unit that is disposed in the vicinity of the light collection position and transmits the light from the light collecting system while diffusing the light from the light collecting system.

Illuminator and projector

The illumination optical system includes a lens array having a plurality of lenses for splitting the light emitted from a light source into a plurality of sub-beams, at least some lenses of the lens array being decentered. The thickness of each of the lenses constituting the lens array is adjusted such that the step difference at the boundaries between the lenses falls within a predetermined step difference.

Illumination optical system and projector comprising the same

PROBLEM TO BE SOLVED: To provide a lighting system for suppressing in-plane light intensity distribution from being nonuniform in an area to be illuminated and suppressing the quality of projected images from deteriorating even when the emission of any LD light source out of a plurality of the LD light sources weakens in the lighting system used preferably for a projector of high brightness. SOLUTION: The lighting system 100 has a first LD light source 10 for emitting an illuminating light flux with a first optical axis 10ax as a center axis; a second LD light source 20 for emitting an illuminating light flux with a second optical axis 20ax as a center axis; and a polarized beam combiner 30 having a polarizing and combining face 32 for reflecting light from the second LD light source 20 and transmitting the light from the first LD light source 10, and combines and emits the light from the first LD light source 10 and the light from the second LD light source 20. The first LD light source 10 is composed so as to emit the light with a P polarized component. The second LD light source 20 is composed so as to emit the light with an S polarized component. COPYRIGHT: (C)2008,JPO&INPIT

Koichi Akiyama

Papers

Illumination device and projector

System and method for providing a substrate having micro-lenses

Illuminator and projector

Illumination optical system and projector comprising the same

Lighting system and projector