K
Koji Matsuoka
Researcher at Panasonic
Publications - 3
Citations - 79
Koji Matsuoka is an academic researcher from Panasonic. The author has contributed to research in topics: Resist & Logic gate. The author has an hindex of 3, co-authored 3 publications receiving 79 citations.
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Patent
Photo mask and pattern forming method
TL;DR: In this article, a resist pattern is formed with a phase-shifting mask 4 in which transparent regions through an opaque region are different 180° in phase from one another, and the widths of the opaque regions 5A and 5B of the mask 4 are changed according to a pattern adjacent thereto, so that a fine pattern having the same line width is formed.
Proceedings ArticleDOI
Application of alternating phase-shifting mask to 0.16 μm CMOS logic gate patterns
Koji Matsuoka,Akio Misaka +1 more
TL;DR: In this article, an alternating phase-shifting mask to 0.16 micrometers logic gate patterns was applied to obtain random gate patterns. And the results showed that the mask pattern with two adjacent apertures transferred an isolated line.
Proceedings ArticleDOI
Optical proximity correction in DRAM cell using a new statistical methodology
TL;DR: In this article, an optical proximity correction algorithm based on statistical methodology is developed for the DRAM cell pattern, where the response surface function (RSF) for the CD in the lithographic process is extended by introducing variables for the mask pattern size.