L
Lee M. Cook
Researcher at IBM
Publications - 1
Citations - 346
Lee M. Cook is an academic researcher from IBM. The author has contributed to research in topics: Chemical-mechanical planarization & Slurry. The author has an hindex of 1, co-authored 1 publications receiving 283 citations.
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Chemical mechanical planarization: slurry chemistry, materials, and mechanisms.
TL;DR: This work focuses on the application of CMP to FEOL and MOL systems, which combines low-k and Ultralow-k materials, and the challenges faced by these systems in the aftermath of the Chernobyl disaster.