The invention discloses a high-resolution roll angle measuring method and device based on a heterodyne interferometric phase method The device comprises a transverse Zeeman double-frequency laser and a beam splitter prism in an emergent light path of the transverse Zeeman double-frequency laser, and a first polarization analyzer and a first photoelectric receiver are arranged in a reflection light path of the beam splitter prism A half-wave plate is arranged in a transmission light path of the beam splitter prism and is located in the middle of a plane mirror array, a phase delay sheet and a right-angle reflecting prism are arranged in a final emergent light path of the half-wave plate, and a second polarization analyzer and a second photoelectric receiver are arranged in a reflection light path of the right-angle reflecting prism The first photoelectric receiver and the second photoelectric receiver are connected with a phase meter, and the output end of the phase meter is connected with an industrial personal computer The superposition performance of acting on the polarized light is utilized when the half-wave plate and the plane mirror array are matched to be used, the half-wave plate is mounted in the plane mirror array and is used in common with the phase delay sheet, and roll angle measuring resolution is further improved

High-resolution roll angle measuring method and device based on heterodyne interferometric phase method

Provided herein are devices and systems that apply full-field optical coherence tomography (OCT) technology to three-dimensional skin tissue imaging. A special designed Mirau type objective and an optical microscope module allowing both OCT mode and orthogonal polarization spectral imaging (OPSI) mode are disclosed.

Three-dimensional optical coherence tomography apparatus and its application

Spatial phase shift lateral shearing interferometer

The invention discloses a light projection device used for the three-dimensional measurement of an object surface. Laser generated by a laser generates polarized light through an optical expansion unit, a mirror and a first polarizing piece. The polarized light is projected to front and back surfaces of a first sensitive optical flat plate, and forms two light paths through the sensitive optical flat plate. The first light path forms vertical polarized light through a second polarizing piece, and the vertical polarized light is projected onto a second sensitive optical flat plate through a first optical wedge pair. The second light path forms vertical polarized light through a third polarizing piece, and the vertical polarized light is projected onto the second sensitive optical flat plate through a second optical wedge pair. Two light paths form combined beam through the second sensitive optical flat plate, and the combined beam is enlarged sequentially through a 1/4 wave piece, an adjustable polarizing piece and a projection objective, and is projected onto the measured object surface. According to the invention, a polarization technology and a phase shift stripe technology are combined; the three-dimensional topography of the surface of various objects of different structures is measured by a machine/off-machine; and the light projection device has strong abilities of vibration resistance and noise dynamic, and especially has strong robustness for the surface measurement of molds with complex structures.

Light projection device used for three-dimensional measurement of object surface

The invention discloses an adjusting method of light path overlap and balancing based on an equal inclination interference principle. According to the adjusting method of the light path overlap and balancing based on the equal inclination interference principle, two auxiliary laser beams are imported, and cyclic annular interference fringes with lightness and darkness at intervals generated by equal inclination interference of the two laser beams adjust two arm light paths of an interferometer to be overlapped. An optical path of one arm light path is adjusted, moving process of the equal interference fringes is observed, and the position at which the moving position of the fringes change is the balanced position or aplanatism position of the two arm optical paths of the interferometer. The adjusting method of the light path overlap or balancing based on the equal inclination interference principle can fast and accurately adjust two arm optical paths of a higher order modes (HOM) interferometer to be adjusted and balanced, is not limited in adjusting of a HOM interferometer, and can be applied to occasions in need of adjusting overlapping and balancing.

Adjusting method of light path overlap and balancing based on equal inclination interference principle

A phase shift transverse shear interferometer consists of a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shear plate, a second shear plate, an output parallel plate, a quarter wave plate, a detecting deflection machine, a CCD camera and a computer, the phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length, and satisfies the wavefront measurement of the different light beam bore and the measurement precision.

Phase shifting lateral direction shearing interferometer

The utility model provides a polarization phase shift double-cut interference wave surface measuring apparatus, comprising a first pressure-sensitive parallel plate, a left and below wedge-shaped optical plate, a left and upper wedge-shaped optical plate, a right and below wedge-shaped optical plate, a right and upper wedge-shaped plate, a second pressure-sensitive parallel plate, a polarization phase shifter, an imaging lens and an image sensor which are arranged along the direction of advance of the light beam in sequence; wherein, an output terminal of the image sensor is connected with a computer. The utility model not only has all the characteristics of the double-cut interference surface measuring apparatus, but also has the advantages that the sensitivity is high, any symmetrical wave surface can be accurately measured, the intact wave surface outline can be given and so on.

Polarized phase shift double shearing interference wave surface measuring apparatus

Disclosed is a phase shift lateral shearing interferometer, which is composed of a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shearing plate, a second shearing plate, an output parallel plate, a quarter-wave plate, an analyzer, a CCD camera and a computer, the phase shift lateral shearing interferometer is an equal optical path interference optical system with continuous and adjustable shearing quantity, and is extremely suitable for the wave-front measurement of short-coherence length light beam, and can meet different light beam caliber and measurement accuracy requirements of wave-front measurement.

Phase shift transversal shearing interferometer

The swing mechanism includes mirror base, bracing frame. The bracing frame is composed of a support rack, left and right swing frames setup with same structure at two side of the support rack. The left swing frame includes two pillars, up sheet support, and low sheet support. Through two pillars, outer sides of the up and low sheet supports are connected to each other fixedly. Through up and low two bearings, the side near to the support rack connected to middle upright post. Being matched to outline size of mirror base, hole of mirror base is made in middle of the up and low sheet supports. Elastic fastening parts are setup on the up sheet support, and low sheet support. Hole of mirror base is in use for mirror base to be placed. Banking screw is setup on left and right swing frames. The invention is suitable to setting up dual optical flat in large aperture. Position control is carried out in direction perpendicular to swing plane. Features are: simple structure and compact.

Double optic flat plate swing mechanism

The disclosed collimator is composed of primary mirror, beam-splitter mirror, and secondary mirror. Both primary mirror and secondary mirror possess positive focal power. The primary mirror possesses long focal length. Being located in front of the back focus of the primary mirror, the beam-splitter mirror is placed in 45 degrees with the optical axis of the primary mirror. Being setup at reflected light path of the beam-splitter mirror, the secondary mirror is located in front of the focus at reflected light path formed by the primary mirror. The primary mirror and the beam-splitter mirror is an aberration-eliminated combination. Being applicable to ground detection and verification device of laser communication terminal, the invention meets requirement of big viewing field for capturing, tracking and detecting purposes, as well as meets requirement of long focal length for tracking and aiming purposes in high precision. Features are: simple structure and easy of operation.

Lijuan Wang

Papers

Phase shifting lateral direction shearing interferometer

Polarized phase shift double shearing interference wave surface measuring apparatus

Phase shift transversal shearing interferometer

Double optic flat plate swing mechanism

Bifocus parallel collimator