Patent
Phase shifting lateral direction shearing interferometer
TLDR
A phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length as mentioned in this paper.Abstract:
A phase shift transverse shear interferometer consists of a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shear plate, a second shear plate, an output parallel plate, a quarter wave plate, a detecting deflection machine, a CCD camera and a computer, the phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length, and satisfies the wavefront measurement of the different light beam bore and the measurement precision.read more
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