L
Linyong Pang
Publications - 1
Citations - 17
Linyong Pang is an academic researcher. The author has contributed to research in topics: Wafer & Mask inspection. The author has an hindex of 1, co-authored 1 publications receiving 17 citations.
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Method and apparatus of wafer print simulation using hybrid model with mask optical images
TL;DR: In this article, a threshold look-up table is used to evaluate the impact of mask defect impact during the transfer of a mask pattern to a wafer layer by using mask images obtained during mask inspection.