L
Lourdes Santa Clara Dominguez
Researcher at Intel
Publications - 1
Citations - 37
Lourdes Santa Clara Dominguez is an academic researcher from Intel. The author has contributed to research in topics: Etching (microfabrication) & Dry etching. The author has an hindex of 1, co-authored 1 publications receiving 37 citations.
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Patent
Composition for etching a metal hard mask material in semiconductor processing
TL;DR: An etching solution for a metal hard mask is described in this paper, which comprises a mixture of a dilute HF (hydrofluoric acid) and a silicon containing precursor.