M
M. Bernard
Researcher at University of Grenoble
Publications - 2
Citations - 163
M. Bernard is an academic researcher from University of Grenoble. The author has contributed to research in topics: Diamond & Etching (microfabrication). The author has an hindex of 2, co-authored 2 publications receiving 139 citations.
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Non-destructive determination of the boron concentration of heavily doped metallic diamond thin films from Raman spectroscopy
TL;DR: In this article, the Raman spectra of heavily boron doped polycrystalline diamond films were used as a non-destructive technique to deduce easily and without contact the BORON concentration of diamond films in the range 2×1020 to 1022 cm−3.
Journal ArticleDOI
Electron cyclotron resonance oxygen plasma etching of diamond
TL;DR: In this paper, a diamond surface is etched by electron cyclotron resonance oxygen plasmas and whiskers between the pillars are found when the samples are covered by Al masks.