Crystallization of thin antimony deposits on amorphous carbon

Effect of electron irradiation on the growth of thin antimony layers deposited on collodion and on carbon in a vacuum of 10-4 Pa

In order to understand the differences existing between films obtained with a classical molecular beam deposition (MBD) and the new low-energy cluster beam deposition (LECBD), transmission electron microscopy has been used to characterize the first stages of antimony LECBD Antimony deposits are discontinuous and amorphous up to 2nm in thickness They are formed with isolated amorphous antimony particles surrounded by an amorphous antimony oxide shell Moreover, under electron beam exposure in the microscope, an amorphous-crystal transformation has been observed in the oxide shell Electron irradiation induces the formation of a crystallized antimony oxide (Sb2O3) around the amorphous antimony core

Electron irradiation effects in amorphous antimony thin films obtained by cluster-beam deposition

Etude de couches minces d'antimoine deposees en incidence normale sous ultravide sur differents supports

Makoto Kato

Papers

Effect of electron irradiation on crystallization of vacuum-deposited amorphous antimony films