Showing papers by "Margrit Hanbücken published in 2004"
TL;DR: In this article, a concave-shaped surface has been prepared in a 6H-SiC polytype substrate by mechanical grinding, where the different crystallographic planes building up the 6H polytype are cut under continuously changing polar angles in all azimuthal directions.
24 citations
TL;DR: In this paper, the authors used electron-beam nanolithography and reactive ion etching to obtain a very regular alignment of metallic and magnetic nanostructures with high density and a narrow size distribution via a self-organised growth process.
17 citations
TL;DR: In this article, an extended set of vicinal surfaces has been prepared in a 6H-SiC(0001) substrate by mechanically grinding a concaveshaped surface, followed by hot hydrogen etching.
6 citations
TL;DR: In this paper, the creation of distinct, periodically structured vicinal Si(1/1) and (1/0/0) substrates has been studied using scanning tunnelling microscopy at various temperatures.
4 citations
TL;DR: In this article, an array of troughs was prepared on a 6H-SiC(0001) surface using focused ion beam (FIB) patterning, and the resulting morphological reorganizations have been studied by scanning electron and atomic force microscopy.
Abstract: An array of troughs was prepared on a 6H-SiC(0001) surface using focused ion beam (FIB) patterning. Troughs were etched with various ion doses and close-to-circular voids of increasing depths for larger ion doses were obtained. The samples were then etched in a hot-wall reactor at a hydrogen partial pressure of 13 mbar at 1800 °C. The resulting morphological reorganizations have been studied by scanning electron and atomic force microscopy. Very regular hexagonal voids with facets oriented perpendicular to the surface were obtained after hydrogen etching. The voids were surrounded by regular secondary facets of lower inclination. Whereas the depth of the voids increases with ion dose, the void diameter and facet sizes stay constant. This effect is explained by surface diffusion during hydrogen etching. The FIB technique in combination with hydrogen etching allows the preparation of very regular surface patterns and highly ordered wells and tubes for nanometer-sized sieves and photonic crystals.
4 citations
Patent•
10 Sep 2004
TL;DR: In this paper, a procede de fabrication d'au moins une cavite dans un materiau (1) presentant une structure cristallographique hexagonale ou cubique, notamment un carbure and/ou un materiasu comportant du silicium, comporting les etapes suivantes : -former dans le materiaus (1, au moins amorce (2) de gravure en au moin un site predetermine (3), graver la cavite a part
Abstract: La presente invention concerne un procede de fabrication d'au moins une cavite dans un materiau (1) presentant une structure cristallographique hexagonale ou cubique, notamment un carbure et/ou un materiau comportant du silicium, comportant les etapes suivantes : - former dans le materiau (1) au moins une amorce (2) de gravure en au moins un site predetermine (3), - graver la cavite a partir de l'amorce (2) formee precedemment en exposant le materiau a un environnement reducteur.