M
Masaei Suwada
Researcher at ASM International
Publications - 12
Citations - 1361
Masaei Suwada is an academic researcher from ASM International. The author has contributed to research in topics: Wafer & Controller (computing). The author has an hindex of 10, co-authored 12 publications receiving 1361 citations.
Papers
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Patent
Wafer processing apparatus with wafer alignment device
TL;DR: In this article, a semiconductor-processing apparatus includes: a wafer handling chamber, wafer processing chamber, and a Wafer Handling Device (WHD) in the x-axis direction.
Patent
Wafer transfer mechanism
TL;DR: In this paper, a transfer mechanism for placing a wafer at a prescribed position on an arm without any additional step is provided for placing the wafer in a specified position on the arm.
Patent
Position sensor system for substrate transfer robot
Masahiro Takizawa,Masaei Suwada +1 more
TL;DR: In this paper, a substrate processing apparatus consisting of a substrate handling chamber, a pair of position sensors, and a substrate transfer robot is described. But this is not the case in our case.
Patent
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
TL;DR: In this paper, the atmosphere of both reaction chamber and transfer chamber are evacuated using the transfer chamber exhaust port, which is located below the surface of the semiconductor wafer, which prevents particles generated during wafer transfer or during deposition from adhering to the surface.
Patent
Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same
TL;DR: In this paper, a semiconductor substrate transfer apparatus for transferring semiconductor substrates from a first container to a second container, including multiple end effectors, at least one robot arm with which the multiple effectors are independently rotatably joined, is described.