M
Masato Kon
Researcher at Aoyama Gakuin University
Publications - 9
Citations - 460
Masato Kon is an academic researcher from Aoyama Gakuin University. The author has contributed to research in topics: Sputtering & Sputter deposition. The author has an hindex of 7, co-authored 9 publications receiving 449 citations.
Papers
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Journal ArticleDOI
Comparative study on structure and internal stress in tin-doped indium oxide and indium-zinc oxide films deposited by r.f. magnetron sputtering
T. Sasabayashi,Norihiro Ito,E Nishimura,Masato Kon,Pung Keun Song,Kentaro Utsumi,A. Kaijo,Yuzo Shigesato +7 more
TL;DR: In this paper, the internal stresses of transparent conductive oxide (TCO) films were measured by the cantilever method in relation to the total gas pressure during the deposition.
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Electrical and optical properties of gallium-doped zinc oxide films deposited by dc magnetron sputtering
TL;DR: In this article, the authors used dc planar magnetron sputtering with a GZO ceramic target for the deposition of gallium-doped zinc oxide (GZO) films.
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Plasma emission control of reactive sputtering process in mid-frequency mode with dual cathodes to deposit photocatalytic TiO2 films
S. Ohno,D. Sato,Masato Kon,Pung Keun Song,Masato Yoshikawa,K. Suzuki,Peter Frach,Yuzo Shigesato +7 more
TL;DR: In this paper, a very high deposition rate was achieved for photocatalytic TiO2 films on unheated non-alkali glass substrates by reactive mid-frequency (mf) magnetron sputtering using dual cathodes with two Ti metal targets.
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Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films
TL;DR: In this paper, aluminum-doped zinc oxide (AZO) films were deposited on glass substrates at 300°C by reactive mid-frequency magnetron sputtering using dual magnetron cathodes with aluminum-zinc alloy targets.
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Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in Mid-Frequency Mode with Dual Cathodes
TL;DR: In this article, aluminum-doped zinc oxide (AZO) films were deposited on heated (300°C) glass substrates by reactive mid-frequency magnetron sputtering using dual magnetron cathodes with aluminum-zinc alloy targets.