M
Matthew W. Coady
Researcher at Brooks Automation, Inc.
Publications - 18
Citations - 273
Matthew W. Coady is an academic researcher from Brooks Automation, Inc.. The author has contributed to research in topics: Paddle & Mobile robot. The author has an hindex of 7, co-authored 18 publications receiving 273 citations.
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Patent
Substrate handling system for aligning and orienting substrates during a transfer operation
TL;DR: In this paper, a system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased is presented.
Patent
Scalable motion control system
Martin Hosek,Stuart Beale,Roumen Botev,Matthew W. Coady,Christopher Hofmeiser,Mark Ives,Jairo Terra Moura,Robert T. Caveney +7 more
TL;DR: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller and a distributed controller including a cluster controller controlled by the master controllers.
Patent
Edge grip aligner with buffering capabilities
TL;DR: In this article, an edge grip aligner with buffering capabilities and a method for increasing the throughput of wafers through the device was presented, where the first and second buffer arms, and a chuck arm, were used to align a workpiece while supported on the chuck arm.
Patent
Load port module
TL;DR: In this paper, a substrate loading device having a frame, a cassette support, and a user interface is described, where the frame is connected to a substrate processing apparatus and a transport opening through which substrates are transported between the device and processing apparatus.
Patent
System for parallel processing of workpieces
TL;DR: In this article, a dual paddle end effector robot (108) is described, which is capable of parallel processing of workpieces and buffering locations for the workpieces at the respective aligners.