An optical inspection module is provided for detecting defects on a substrate having first and second opposite planar surfaces. The module includes a substrate holding position and first and second measurement instruments. The first instrument includes a first illumination path extending to the substrate holding position and having a grazing angle of incidence with the first surface, which illuminates substantially the entire first surface. A first optical element is oriented to collect non-specularly reflected light scattered by the first surface. A first photodetector has a plurality of pixels positioned within a focal plane of the first lens, which together form a field of view that covers substantially the entire first surface. The second instrument includes a sensor oriented for sensing a physical characteristic of the second surface when the substrate is held in the substrate holding position and the first surface is being illuminated.

Optical method and apparatus for inspecting large area planar objects

A scanning laser contaminant and defect detector for reflective surfaces, having a light collector for increasing sensitivity to scattered light. The collector is preferably one quadrant of a spherical shell cradled between V-shaped reflective side walls. The collector has beam entrance and exit ports, as well as a detector port where a light detector resides. The collector is placed in proximity to a surface to be inspected. Light scattered from the test surface is directed to the reflective crown surface, then to the reflective side walls and ultimately to the detector.

Scanning contaminant and defect detector

A defect inspection method includes radiating an illumination slit-shaped beam having lights substantially parallel to a longitudinal direction to a substrate having circuit patterns in a direction inclined at a predetermined gradient relative to the direction of a line normal to the substrate and inclined at a predetermined gradient on a surface with respect to a group of main straight lines of the circuit patterns with its longitudinal direction oriented almost perpendicularly to a direction of a movement of the substrate. Scattered light reflected by a defect such as a foreign particle existing on the illuminated substrate is received and converted into a detection signal by using an image sensor, and defect judging is effected of an extracted a signal indicating a defect such as a foreign particle on the basis of the detection signal output.

Apparatus and method for testing defects

An optical inspection module (10, 299, 408) detects defects on a substrate (28, 222, 310, 414) and includes a light beam path (38) which extends from a light source (14, 300) to a substrate holder (18, 220, 312) and has a grazing angle of incidence (44) with respect to the substrate (28, 222, 310, 414). The light beam path (38) illuminates substantially the entire substrate. A lens (60) is oriented to collect non-specularly reflected light scattered from the light beam path (38) by any defects on the substrate. A photodetector array (62) has a plurality of pixels which correspond to respective areas on the substrate. The plurality of pixels together form a field of view (66) that covers substantially the entire substrate.

Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

An apparatus is disclosed for measuring the roughness of a surface with improved accuracy. The apparatus, several embodiments of which are disclosed, includes a device for illuminating a surface being studied and a photosensitive detector for determining the maximum intensity of light reflected on the surface. Apparatus is also provided for detemining two points at which the intensity of the reflected light has fallen to a selected fraction of its maximum intensity. The distance between these two points is then measured along the intersection of the plane of incidence of the illuminating beam with a plane perpendicular to the direction of specular reflection. This distance provides an accurate quantitative measure of the roughness of the surface being studied.

Device for measuring the roughness of a surface

A surface inspection system uses a highly focused spot of light moved rapidly over the surface to perform an inspection This permits a ready location of the defects, gives some indication as to their size, and permits a high resolution inspection to be performed in a relatively short time An optical arrangement is employed in which a scanned beam is brought back through the same lens system used in generating the scan to produce an immobilized return signal beam A stop or spatial filter is used on the return beam to permit only the light scattered from defects to reach a detector

Mcmahon R

Papers

Surface inspection with scanned focused light beams