M
Michael J. Zolock
Researcher at Hitachi
Publications - 8
Citations - 127
Michael J. Zolock is an academic researcher from Hitachi. The author has contributed to research in topics: Mass flow controller & Thermal mass flow meter. The author has an hindex of 6, co-authored 8 publications receiving 127 citations.
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Patent
Mass flow controller with onboard diagnostics, prognostics, and data logging
Alexei V. Smirnov,Patrick Albright,Cy Jordan,Arun Nagarajan,Michael J. Zolock,Ryan Johnson,Alexander Fernandez +6 more
TL;DR: In this article, a mass flow controller and a data logging component are described, and a diagnostics component diagnoses failures using current functional parameter values and the statistical values stored in the short-term memory.
Patent
Mass flow controller with enhanced operating range
TL;DR: In this paper, a mass flow controller including a thermal mass flow sensor including at least two sensing elements coupled to a sensor tube of the Mass Flow Controller is described, which is designed to provide a first signal indicative of flow of a gas within a first flow-rate-range and a second signal indicating the flow of the gas inside a second-rate range.
Patent
Multi-mode control algorithm
TL;DR: In this paper, a multi-mode control algorithm is used by a flow controller to control a flow of a fluid according to a set point in a closed-loop mode to an openloop mode.
Patent
Method and mass flow controller for enhanced operating range
TL;DR: In this paper, a mass flow controller (MFC) and a method for calibrating an MFC are disclosed, which includes data relative to two signals from a thermal mass flow sensor when operating the MFC at different flow rates with a calibration gas, and storing the data relating to the two signals in connection with corresponding flow-rate values.
Patent
Flow controller delivery of a specified quantity of a fluid
TL;DR: In this article, a system and method for delivering a specifiedquantity of a fluid using a flow controller based on a fluid delivery profile is described, which includes a delivery time window with a plurality of set points that each correspond with a specified instant in time within the time window.