Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.

Substrate Processing Apparatus

A secure communication platform on an integrated circuit is a highly integrated security processor which incorporates a general purpose digital signal processor (DSP) (62), along with a number of high performance cryptographic function elements, as well as a PCI and PCMCIA (14) interface. The secure communications platform is integrated with an off-the-shelf DSP so that a vendor who is interested in digital signal processing could also receive built-in security functions which cooperate with the DSP. The integrated circuit includes a callable library of cryptographic commands and encryption algorithms. An encryption processor is included to perform key and data encryption, as well as a high performance hash processor and a public key accelerator (28).

Cryptographic co-processor

The present invention provides, among other things, a multi-modal device for facilitating wireless communication over any one of a plurality of wireless communication networks operating pursuant to differing transmission protocols and/or over differing radio frequencies.

Adaptive Omni-Modal Radio Apparatus and Methods

A wireless, multi-modal access device and system adapted to integrate a number of communications networks operating in differing communication modes to facilitate transfer of communication links during a communication session to promote efficient use of the communication networks. The system includes a plurality of Universal Multi-Modal Access Devices UMMAD that are capable of operating at different frequencies and different protocols (TDMA, AMPS, CDMA, GSM, PCS etc) to communicate with any one of a number of Wide Bandwidth Gateways (WBG), which are each capable of communication using one or more of the protocols. The communication links may be switched from one WBG to another or from one protocol to another during a communication session to continue the session under the control of a Universal System Traffic Controller. Numerous other applications of the UMMADs for unique identification and e-commerce are disclosed.

Tiered wireless, multi-modal access system and method

A handheld device for use in a wireless environment to operate an apparatus is provided. The handheld device sends a request to an apparatus controller to initiate a maintenance sequence. The handheld device receives information from the apparatus controller to control the operation of the maintenance sequence. The handheld device sends a maintenance command to the apparatus controller. The handheld device then receives information regarding the state of the apparatus after the maintenance command is executed.

Method and system for using short ranged wireless enabled computers as a service tool

A demodulator is described for demodulating phase-encoded data signals transmitted on a noisy communication channel, such as, for example, radio communication channels of a radio communication system. The demodulator includes a digital phase-locked loop for phase-locking to the mid-bit transitions of the phase-encoded data signal, which, in the preferred embodiment is encoded according to the well known Manchester coding format, and further includes demodulating circuitry for sampling the phase-encoded data signal a predetermind number of times, weighting the samples according to predetermined weighting factors, totalizing the weighted samples for each bit interval and comparing the totalized samples to a predetermined threshold value for ascertaining the logical state of each bit of the phase-encoded data signal. For example, if the magnitude of the totalized samples is greater than or equal to the threshold value, a logical one state may be provided for the decoded data signal, and, if the magnitude of the totalized samples is less than the threshold value, a logical zero state may be provided for the decoded data signal. In preferred embodiments of the present invention, the weighting factors assigned to each sample may be either binary weighted or sine weighted, although any suitable weighting factors may be utilized depending on the characteristics of the phase-encoded data signal. The phase-encoded data signal demodulator embodying the present invention is particularly well adapted for demodulating high speed, phase-encoded data signals transmitted over radio channels to mobile and portable stations of a radio communication system.

Phase-encoded data signal demodulator

A cryptographic apparatus (10) for encrypting and decrypting digital words includes a mechanism that permits a cipher algorithm to be electronically stored after the manufacture of the apparatus. The storing mechanism includes at least one electrically erasable, programmable gate array (34, 36) containing a portion of the cipher algorithm and at least one random access memory device (32) coupled to the array for storing digital data generated by the algorithm. A mechanism (12) which is coupled to the gate array and memory device controls the execution of the algorithm for each digital word thereby decrypting encrypted digital words and encrypting non-encrypted digital words.

Cryptographic method and apparatus with electronically redefinable algorithm.

A monolithic, software-definable, power amplifier is provided. According to one embodiment of the invention, power amplifier circuits can be tuned to the most efficient power amplification characteristics as determined by a digital microprocessor based on varying data. The data may relate to user density, carrier frequency and spectral band. The power amplifier circuits may also be formed on semiconductor structures that include monocrystalline silicon substrates and layers of monocrystalline compound semiconductors. In these structures, the power amplifier may be integrated in a single integrated circuit wherein portions of the power amplifier circuits may be formed on the silicon substrate and portions may be formed on the compound semiconductor. This configuration may substantially increase efficiency of the integrated power amplifier according to the invention.

Monolithic, software-definable circuit including a power amplifier and method for use therewith

L'invention concerne un amplificateur de puissance monolithique programmable par logiciel. Dans un premier mode de realisation de cette invention, on peut accorder des circuits (3900) d'amplificateur de puissance selon les caracteristiques d'amplification de puissance les plus efficaces determinees par un microprocesseur numerique (3912) d'apres des donnees de variation. Les donnees peuvent avoir trait a un volume utilisateur, a une frequence porteuse et a une bande spectrale. Les circuits d'amplificateur de puissance peuvent egalement etre formes sur des structures de semi-conducteurs comprenant des substrats de silicium monocristallin (3910) et des couches de semi-conducteurs composes monocristallins (3920). Dans ces structures, l'amplificateur de puissance (3900) peut etre integre dans un seul circuit integre, dont des parties des circuits d'amplificateur de puissance (3900) peuvent etre formees sur le substrat de silicium (3910) et dont des parties peuvent etre formees sur la couche de semi-conducteurs composees (3920). Cette configuration peut ameliorer sensiblement l'efficacite de l'amplificateur de puissance integre de cette invention.

Circuit monolithique, programmable par logiciel comprenant un amplificateur de puissance

A monolithic, software-definable, power amplifier is provided. According to one embodiment of the invention, power amplifier circuits (3900) can be tuned to the most efficient power amplification characteristics as determined by a digital microprocessor (3912) based on varying data. The data may relate to user density, carrier frequency and spectral band. The power amplifier circuits may also be formed on semiconductor structures that include monocrystalline silicon substrates (3910) and layers of monocrystalline compound semiconductors (3920). In these structures, the power amplifier (3900) may be integrated in a single integrated circuit wherein portions of the power amplifier circuits (3900) may be formed on the silicon substrate (3910) and portions may be formed on the compound semiconductor layer (3920). This configuration may substantially increase efficiency of the integrated power amplifier according to the invention.

Michael Mcclaughry

Papers

Phase-encoded data signal demodulator

Cryptographic method and apparatus with electronically redefinable algorithm.

Monolithic, software-definable circuit including a power amplifier and method for use therewith

Circuit monolithique, programmable par logiciel comprenant un amplificateur de puissance

Monolithic, software-definable circuit including a power amplifier