Multi-beam micro- and nano-machining of material surfaces has been getting more important because of its great potential to increase production speed of large size laser induced periodic surface structures (LIPSS). Fast and cheap production of engineered surfaces structures can bring unique properties of surfaces like tailored wettability, friction, antibacterial properties, etc., to mass-production with consequence in, for example, energy and costs savings. However, tailoring of long-term stable interference patterns from ultrashort laser pulses requires an extremely stable laser system with nearly diffraction-limited output beams. HiLASE Centre developed such a thin-disk-based Yb:YAG sub-picosecond laser platform, PERLA, providing average output power up to 0.5 kW with 2nd and 4th harmonic generation extensions and demonstrated its potential for direct laser interference patterning (DLIP). In this paper, we focus on details of the thin-disk PERLA laser.

Picosecond thin-disk laser platform PERLA for multi-beam micromachining

A unique combination of the ultrashort high-energy pulsed laser system with exceptional beam quality and a novel Diffractive Optical Element (DOE) enables simultaneous production of 2601 spots organized in the square-shaped 1 × 1 mm matrix in less than 0.01 ms. By adjusting the laser and processing parameters each spot can contain Laser Induced Periodic Surface Structures (LIPSS, ripples), including high-spatial frequency LIPSS (HFSL) and low-spatial frequency LIPSS (LSFL). DOE placed before galvanometric scanner allows easy integration and stitching of the pattern over larger areas. In addition, the LIPSS formation was monitored for the first time using fast infrared radiometry for verification of real-time quality control possibilities. During the LIPSS fabrication, solidification plateaus were observed after each laser pulse, which enables process control by monitoring heat accumulation or plateau length using a new signal derivation approach. Analysis of solidification plateaus after each laser pulse enabled dynamic calibration of the measurement. Heat accumulation temperatures from 200 to 1000 °C were observed from measurement and compared to the theoretical model. The temperature measurements revealed interesting changes in the physics of the laser ablation process. Moreover, the highest throughput on the area of 40 × 40 mm reached 1910 cm2/min, which is the highest demonstrated throughput of LIPSS nanostructuring, to the best of our knowledge. Thus, showing great potential for the efficient production of LIPSS-based functional surfaces which can be used to improve surface mechanical, biological or optical properties.

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

Superhydrophobic surfaces attract a lot of attention due to many potential applications including anti-icing, anti-corrosion, self-cleaning or drag-reduction surfaces. Despite a list of attractive applications of superhydrophobic surfaces and demonstrated capability of lasers to produce them, the speed of laser micro and nanostructuring is still low with respect to many industry standards. Up-to-now, most promising multi-beam solutions can improve processing speed a hundred to a thousand times. However, productive and efficient utilization of a new generation of kW-class ultrashort pulsed lasers for precise nanostructuring requires a much higher number of beams. In this work, we introduce a unique combination of high-energy pulsed ultrashort laser system delivering up to 20 mJ at 1030 nm in 1.7 ps and novel Diffractive Laser-Induced Texturing element (DLITe) capable of producing 201 × 201 sub-beams of 5 µm in diameter on a square area of 1 mm2. Simultaneous nanostructuring with 40,401 sub-beams resulted in a matrix of microcraters covered by nanogratings and ripples with periodicity below 470 nm and 720 nm, respectively. The processed area demonstrated hydrophobic to superhydrophobic properties with a maximum contact angle of 153°.

https://www.mdpi.com/2079-4991/11/8/1987/pdf

Towards Rapid Fabrication of Superhydrophobic Surfaces by Multi-Beam Nanostructuring with 40,401 Beams

Micro-hole arrays have found wide applications in aerospace, precision instruments, and biomedicine. Among various methods of their production, including mechanical, laser, and electrical discharge, electrochemical machining (ECM) is considered the most lucrative due to its wide processing range, high surface quality, and excellent productivity. In particular, ultrasound-assisted through-mask ECM exhibits an enhanced machining precision due to ultrasonic cavitation, which promotes the removal of the electrolytic products and bubbles. In this study, the equation of cavitation bubble oscillation was derived and numerically solved to study the influence of six different parameters on the ultrasonic cavitation and electrolysis process, and their optimal values were determined. The feasibility of the proposed ultrasound-assisted through-mask ECM technology with the optimized parameters was experimentally corroborated by the fabrication of a high-quality hole array in an oxide dispersion strengthened (ODS) MA956 superalloy.

Ultrasound-Assisted Through-Mask Electrochemical Machining of Hole Arrays in ODS Superalloy.

Reflectivity and surface topography of tempered glass were modified without any thermal damage to the surroundings by utilizing 1.7 ps ultrashort pulsed laser on its fundamental wavelength of 1030 nm. To speed up the fabrication, a dynamic beam shaping unit combined with a galvanometer scanning head was applied to divide the initial laser beam into a matrix of beamlets with adjustable beamlets number and separation distance. By tuning the laser and processing parameters, reflected intensity can be reduced up to 75% while maintaining 90% of transparency thus showing great potential for display functionalization of mobile phones or laptops.

Anti-Reflection Nanostructures on Tempered Glass by Dynamic Beam Shaping.

To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its unique properties, especially a low coefficient of thermal expansion. In this study, a novel cost-efficient method of multi-beam micromachining of invar will be introduced. The combination of a Meopta beam splitting, focusing and monitoring module with a galvanometer scanner and HiLASE high-energy pulse laser system emitting ultrashort pulses at 515 nm allows drilling and cutting of invar foil with 784 beams at once with high precision and almost no thermal effects and heat-affected zone, thus significantly improving the throughput and efficiency.

Michael Písařík

Papers

Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm.