Publisher Summary This chapter describes the phase-measurement interferometry techniques. For all techniques, a temporal phase modulation is introduced to perform the measurement. By measuring the interferogram intensity as the phase is shifted, the phase of the wavefront can be determined with the aid of electronics or a computer. Phase modulation in an interferometer can be induced by moving a mirror, tilting a glass plate, moving a grating, rotating a half-wave plate or analyzer, using an acousto-optic or electro-optic modulator, or using a Zeeman laser. Phase-measurement techniques using analytical means to determine phase all have some common denominators. There are different equations for calculating the phase of a wavefront from interference fringe intensity measurements. The precision of a phase-measuring interferometer system can be determined by taking two measurements, subtracting them, and looking at the root-meansquare of the difference wavefront. The chapter discusses the simulation results. The elimination of the errors that reduce the measurement accuracy depends on the type of measurement being performed. Phase-measurement interferometry (PMI) can be applied to any two-beam interferometer, including holographic interferometers. Applications can be divided into: surface figure, surface roughness, and metrology.

V Phase-Measurement Interferometry Techniques

A self-scanned 1024 element photodiode array and minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100. The photodiode array samples intensities over a 32 x 32 matrix in the interference pattern as the length of the reference arm is varied piezoelectrically. Using these data the minicomputer synchronously detects the phase at each of the 1024 points by a Fourier series method and displays the wavefront in contour and perspective plot on a storage oscilloscope in less than 1 min (Bruning et al. Paper WE16, OSA Annual Meeting, Oct. 1972). The array of intensities is sampled and averaged many times in a random fashion so that the effects of air turbulence, vibrations, and thermal drifts are minimized. Very significant is the fact that wavefront errors in the interferometer are easily determined and may be automatically subtracted from current or subsequent wavefrots. Various programs supporting the measurement system include software for determining the aperture boundary, sum and difference of wavefronts, removal or insertion of tilt and focus errors, and routines for spatial manipulation of wavefronts. FFT programs transform wavefront data into point spread function and modulus and phase of the optical transfer function of lenses. Display programs plot these functions in contour and perspective. The system has been designed to optimize the collection of data to give higher than usual accuracy in measuring the individual elements and final performance of assembled diffraction limited optical systems, and furthermore, the short loop time of a few minutes makes the system an attractive alternative to constraints imposed by test glasses in the optical shop.

Digital wavefront measuring interferometer for testing optical surfaces and lenses

Phase-shifting interferometry suffers from two main sources of error: phase-shift miscalibration and detector nonlinearity. Algorithms that calculate the phase of a measured wave front require a high degree of tolerance for these error sources. An extended method for deriving such error-compensating algorithms patterned on the sequential application of the averaging technique is proposed here. Two classes of algorithms were derived. One class is based on the popular three-frame technique, and the other class is based on the 4-frame technique. The derivation of algorithms in these classes was calculated for algorithms with up to six frames. The new 5-frame algorithm and two new 6-frame algorithms have smaller phase errors caused by phase-shifter miscalibration than any of the common 3-, 4- or 5-frame algorithms. An analysis of the errors resulting from algorithms in both classes is provided by computer simulation and by an investigation of the spectra of sampling functions.

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Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry.

A general description of phase measurement by digital heterodyne techniques is presented in which the heterodyning is explained as a filtering process in the frequency domain Examples of commonly used algorithms are given Special emphasis is given to the analysis of systematic errors Gaussian error propagation is used to derive equations for the random phase errors of common algorithms

Fourier description of digital phase-measuring interferometry

Conventional phase-shifting algorithms based on a least-squares estimate use N samples over an incomplete period of the sampled waveform We introduce a class of phase-shifting algorithms having N + 1 samples symmetrically disposed over one full period of the sampled waveform Fourier analysis techniques are used to derive these algorithms and modify them to improve their performance in the presence of phase-shift errors The algorithms can be used in phase measurement systems having periodic, but not necessarily sinusoidal, waveforms

Design and assessment of symmetrical phase-shifting algorithms

It is shown that phase-extraction algorithms in phase-measurement interferometry can be developed from the principle of least-squares estimation. It is then demonstrated that this view can be taken to develop algorithms that estimate the phase in the presence of external perturbations. To illustrate, an algorithm is developed that extracts the phase in the presence of a linear time-dependent drift.

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Papers

Least-squares estimation in phase-measurement interferometry.