A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

One embodiment provides an apparatus for displaying an image comprising: a first optical substrate comprising at least one waveguide layer configured to propagate light in a first direction, wherein the at least one waveguide layer of the first optical substrate comprises at least one grating lamina configured to extract the light from the first substrate along the first direction; and a second optical substrate comprising at least one waveguide layer configured to propagate the light in a second direction, wherein the at least one waveguide layer of the second optical substrate comprises at least one grating lamina configured to extract light from the second substrate along the second direction; wherein the at least one grating lamina of at least one of the first and second optical substrates comprises an SBG in a passive mode.

Transparent waveguide display

Provided in one embodiment is an apparatus for displaying an image, comprising: an input image node configured to provide at least a first and a second image modulated lights; and a holographic waveguide device configured to propagate the at least one of the first and second image modulated lights in at least a first direction. The holographic waveguide device comprises: at least a first and second interspersed multiplicities of grating elements disposed in at least one layer, the first and second grating elements having respectively a first and a second prescriptions. The first and second multiplicity of grating elements are configured to deflect respectively the first and second image modulated lights out of the at least one layer into respectively a first and a second multiplicities of output rays forming respectively a first and second FOV tiles.

Holographic wide angle display

This head-mounted display device is a head-mounted display device that has: an eyeglasses type frame that has a rim part and is for affixing to the head part of a wearer; a display part that displays an image; and an eyepiece optical part that guides an image displayed in the display part to at least one eye of the wearer, displaying the same as an enlarged virtual image. The present invention is characterized by the display part and the eyepiece optical part being attached to the rim part, the optical axis of incident light which is the image light made incident to the eyepiece optical part from the display part and the optical axis of output light which is the image light output toward the eye of the wearer from the eyepiece optical part not being in the same plane, and an angle formed by two vectors, the incident light vector formed by the incident light and the output light vector formed by the output light being greater than 90°.

Head-mounted display device

An eye tracker having a waveguide for propagating illumination light towards an eye and propagating image light reflected from at least one surface of an eye, a light source optically coupled to the waveguide, and a detector optically coupled to the waveguide. Disposed in the waveguide is at least one grating lamina for deflecting the illumination light towards the eye along a first waveguide path and deflecting the image light towards the detector along a second waveguide path.

Apparatus for eye tracking

An optical relay comprises a light-transmissive substrate having a plurality of diffractive optical elements, where at least one diffractive optical element is characterized by nonuniform diffraction efficiency. The substrate and diffractive optical elements are designed and constructed to relay at least a portion of a light beam emanating from an object to at least one predetermined eye-box in a manner such that for each point of the object, there is a set of parallel outgoing light rays originating from the point and arriving to the eye-box. The color difference between any two parallel light rays of the set is less than 50 ΔE* units.

Diffractive optical relay device with improved color uniformity

A diffractive optical element is disclosed. The optical element comprises a grating having a periodic linear structure in at least one direction. The linear structure is characterized by non-uniform duty cycle selected to ensure non-uniform diffraction efficiency.

Diffraction grating with a spatially varying duty-cycle

An optical relay device, for relaying polychromatic light is disclosed. The device comprises: an input optical element formed in a planar substrate for receiving and redirecting the light for propagation of the light in a lateral direction within the substrate; and an output optical element formed in the substrate for receiving light propagating within the substrate and coupling the light out of the substrate. The device further comprises a reflector assembly at least partially coating opposite surfaces of the substrate for substantially reflecting light rays impinging on the reflector assembly at an angle within a first angular range, and substantially transmitting light rays of the polychromatic light impinging on the reflector assembly at an angle within a second angular range. In some embodiments of the present invention the input optical element and the output optical element are diffraction gratings having a periodic profile shaped such that at least one portion of the light is dominantly coupled into a diffraction order m satisfying |m| > 1.

Optical device for relaying polychromatic light

PROBLEM TO BE SOLVED: To provide a TDI sensor for an electron beam image capable of making the inspection of a pattern defect of a mask for the electron beam higher speed and higher precision. SOLUTION: The TDI sensor comprises: a fiber optical plate (FOP) 76; a scintillator 75 provided on one end face of the FOP, converting an electron image into an optical image; the time delay integration type TDI optical image sensor 77 provided adjacent to the another end of the FOP 76. Where, between the other end surface of the FOP 76 and the TDI image sensor 77 is bonded with an optical transparent adhesive agent 80. COPYRIGHT: (C)2004,JPO&NCIPI

Moti Itzkovitch

Papers

Diffractive optical relay device with improved color uniformity

Diffraction grating with a spatially varying duty-cycle

Optical device for relaying polychromatic light

Tdi sensor for electron beam image, and mask inspection device