M
Mvoung-Seok Kim
Researcher at Yonsei University
Publications - 1
Mvoung-Seok Kim is an academic researcher from Yonsei University. The author has contributed to research in topics: Molecular beam epitaxy & Surface states. The author has co-authored 1 publications.
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Proceedings ArticleDOI
Effect on the electrical properties of HfO/sub 2/ films grown by metal-organic molecular beam epitaxy
TL;DR: In this paper, the characteristics of the HfO/sub 2/ dielectric layer on the p-type Si substrate by MOMBE process have been investigated, and the electrical properties, surface morphology, and relative concentration of HfOs/Sub 2/ films could be tuned by O ∆ 2/Ar ratio.