A process mass flow instrument for measuring the mass flow rate of a process fluid including a fluid inlet, a fluid outlet, a flow passage connecting the fluid inlet and the fluid outlet, a fluid flow sensor which provides a raw output signal corresponding to an unknown mass flow rate and a processor which contains an empirically derived conversion routine for converting the raw output signal to an adjusted signal indicating the mass flow rate of the process fluid. A method for determining an unknown mass flow using an empirically derived conversion function, the function being derived by correlating the output signals of a mass flow instrument sensing the flow of a calibration fluid with the output signals of the mass flow instrument sensing the flow of the process fluid.

Method and apparatus for detecting and controlling mass flow

A gas panel (200) comprising a plurality of discrete blocks (202, 204) includes a first functional component coupled to a first face of a first block (310) the first face having a first port configuration. A second functional component is coupled to a first face of a second block (320) the first face of the second block having the first port configuration. The first functional component is different than the second functional component.

Building blocks for integrated gas panel

A fluid mass flow controller (20) includes a control circuit (70, 72, 74, 76, 80) connected to pressure sensors (46, 48) for sensing the differential pressure across a restrictor (56) for controlling a valve (40) to control the fluid mass flow rate to a setpoint. The control circuit (70, 72, 74, 76, 80) compares the differential pressure with the downstream pressure at a measured temperature with a data set of a gas passing through the flow controller (20) over a range of differential pressures and downstream pressures and adjusts the flow control rate accordingly. The flow controller (20) includes a two part body (22). The flow restrictor (56) may comprise an orifice or nozzle but preferably comprises a sintered metal plug having a predetermined porosity for the expected materials and flow conditions to which the flow controller (20) would be exposed.

Fluid flow controller and method of operation

A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

Vapor Delivery Device, Methods of Manufacture And Methods of Use Thereof

A system and method for integrating gas components that combines together, either in an in-line or modular fashion, at least two gas components used in a gas stick for flowing a gas from a first point to an end point. In one embodiment, the present invention can be used to combine a pressure transducer, a filter, and a display into a single unit that will reduce the gas stick size along the gas flow axis of the gas stick. The gas components can be integrated using VCR connections for an in-line use of the present invention. In the modular form, the present invention can use a number of different connections to connect the gas components vertically on a modular base block (i.e., stacked approximately perpendicular to the modular base block). Thus, the gas components will stack vertically with respect to the traditional horizontal gas flow path axis.

System and method for integrating gas components

A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.

Nelson Urdaneta

Papers

Mass flow controller with vertical purifier