Labeled targets on a support synthesized with polymer sequences at known locations according to the methods disclosed in U.S. Pat. No. 5,143,854 and PCT WO 92/10092 or others, can be detected by exposing selected regions of sample 1500 to radiation from a source 1100 and detecting the emission therefrom, and repeating the steps of exposition and detection until the sample is completely examined.

Method and apparatus for imaging a sample on a device

Fluorescently marked targets bind to a substrate 230 synthesized with polymer sequences at known locations. The targets are detected by exposing selected regions of the substrate 230 to light from a light source 100 and detecting the photons from the light fluoresced therefrom, and repeating the steps of exposure and detection until the substrate 230 is completely examined. The resulting data can be used to determine binding affinity of the targets to specific polymer sequences.

Method and apparatus for detection of fluorescently labeled materials

A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.

Lithographic apparatus, and device manufacturing method

Labeled targets on a support synthesized with polymer sequences at known locations according to the methods disclosed in U.S. Pat. No. 5,143,854 and PCT WO 92/10092 or others, can be detected by exposing marked regions of sample to radiation from a source and detecting the emission therefrom, and repeating the steps of exposition and detection until the sample is completely examined.

Systems and methods for detection of labeled materials

A process for applying a metallization interconnect structure to a semiconductor workpiece having a barrier layer deposited on a surface thereof is set forth. The process includes the forming of an ultra-thin metal seed layer on the barrier layer. The ultra-thin seed layer having a thickness of less than or equal to about 500 Angstroms. The ultra-thin seed layer is then enhanced by depositing additional metal thereon to provide an enhanced seed layer. The enhanced seed layer has a thickness at all points on sidewalls of substantially all recessed features distributed within the workpiece that is equal to or greater than about 10% of the nominal seed layer thickness over an exteriorly disposed surface of the workpiece.

Apparatus and method for electrolytically depositing copper on a semiconductor workpiece

A robot hand changer for industrial robots, having a changer unit mounted fixedly on the industrial robots and a changer adapter holding a robot hand and being detachably fitted in the change unit. The changer unit has a fluid-operated piston and clamping balls urged toward a clamping position by the fluid-operated piston. The changer adapter is fitted in the changer unit and clamped by the agency of the clamping piston. A plurality of such changer adapters holding different kinds of robot hand are prepared.

An automatic hand changing device for industrial robots

A safety method in a robot system including at least a robot (1), peripheral equipment (2-5) serviced by the robot, a robot control unit (6) which causes the robot to execute predetermined services for the peripheral equipment, and a teach control panel (9). A door (11) is provided at the entrance to a robot operating zone, and the door is provided with a safety switch (12) for terminating automatic operation of the robot when the robot is in an automatic operating state. When the safety switch is actuated by opening the door, robot motion in the automatic operating state is decelerated and stopped. During the time that the safety switch is in the actuated state, the robot is placed in a playback operation state to enable control that is performed through the teach control panel.

Robot system safety method

A multi-articulation type robot for a laser operation by emitting a beam of laser into a desired position in a three-dimensional space, and provided with a first hollow robot arm (16) swingably pivoted to an upper end of a robot swivel body (14) mounted on a robot base (12), a second hollow robot arm (18) swingably pivoted to a front end of the first robot arm (16) and rotatable about a central axis of the second robot arm per se, and a robot wrist (20) mounted on a front end of the second robot arm (18) and provided with a laser beam collecting unit (22) having a laser beam emitting outlet (22a), the robot wrist (20) being provided with motion transmitting mechanisms for converting first and second rotative inputs transmitted by a first and second hollow rotatable drive shafts (30a and 30b) arranged inside the second robot arm (18) into motions by which the laser beam collecting unit (22) is rotated about an axis orthogonal to an axis along which a laser beam is emitted, and to move the unit (22) forward and back along the axis of the laser emission.

Multi-articulation type robot for laser operation

A hand changing device for industrial robots, having a changer body (10) designed to be attached to the robot arm (92) and a changer adapter (50) carrying a robot hand. The changer body (10) and the changer adapter (50) are separate components designed to be coupled detachably. The changer adapter (50) carrying the robot hand (74) is clamped by the changer body (10) by the engagement of a plurality of clamping balls retained within the changer body (10) and a ball engaging part formed in the changer adapter (50). The changer body (10) is provided with a fluid-driven piston (20) to move the clamping balls between two positions, namely, the clamping position and the idle position.

Hand changing device for industrial robots

A system for controlling an industrial robot having a wrist (1) driven to rotate by a direct-current motor (2) having a servomechanism, wherein stroke-limit position control (6) of the wrist and rotational control (7) of the wrist can be selectively carried out.

Nobutoshi Torii

Papers

An automatic hand changing device for industrial robots

Robot system safety method

Multi-articulation type robot for laser operation

Hand changing device for industrial robots

System for controlling an industrial robot