오
오니시다카시
Publications - 1
오니시다카시 is an academic researcher. The author has contributed to research in topics: Volume (thermodynamics) & Sputtering. The author has co-authored 1 publications.
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Aluminum or aluminum alloy sputtering target and method for manufacturing the same
TL;DR: In this paper, a sputtering target is manufactured by adjusting the ratio of the gas flow volume (Nm3)/molten liquid flow mass (kg) to 5 Nm3/kg or more in the gas atomizing step of the spray forming method using an Al or Al alloy sputtering targets.