The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron beamlets; a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optical system comprising an array of electrostatic lenses wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Electron beam exposure system

PURPOSE:To improve S/N with an increased Kerr rotational angle for laser light, by providing an amorphous thin film of the rare-earth transition metal on a transparent base and a specific reflection film on said film. CONSTITUTION:In a magnetooptic storage element performing recording, reproduction and erasion of information by means of a laser light, a rare-earth transition metal amorphous thin film 2 having a magnetization easy axis vertical to a film such as GdTbFe, TbDyFe or GdDyFe is formed on a base 1 made of glass. At the back side of the film 2, a reflection film 3 made of Au, Ag or Cu in which the real part of a refractive index is <=1 and the imaginary part is -3--4, is provided. The beam made incident from the base 1 is reflected on the surface of the amorphous thin film 2 and the beam passing through the surface is reflected on the film 3. The two types of reflected lights are synthesized and added with Kerr effect and Farady effect to increase the apparent kerr rotational angle, allowing to improve the S/N of the obtained information.

Magnetooptic storage element

PURPOSE:To improve the S/N ratio of a reproduced signal by laminating the 1st and the 2nd magnetic film layer which differ in refractive index on a transparent substrate and utilizing Fraday effect and Kerr effect in combination. CONSTITUTION:On the transparent substrate 5, the 1st magnetic layer 1 and the 2nd magnetic layer 2 are laminated. Both magnetic layers consists of vertically magnetized films which differ in refractive index sufficiently and reproducing light is reflected by the interface between the magnetic layers 1 and 2. The repoducing light A entered from the substrate side 5 is reflected partially by the surface of the 1st magnetic layer 1 and its reflected light B has the plane of polarization rotated by Kerr effect. The transmitted light has the plane of polarization rotated by Faraday effect, and also has the plane of polarization rotated by Kerr effect when reflected by the interface with the magnetic film 2 and the plane of the polarization rotated again by Faraday effect when transmitted through the magnetic film 1 to obtain reflected light C. The directions of rotations bt Faraday effect and Kerr effect are made coincide with each other. Consequently, the reflected light B and reflected light C become to be arithmetically, thereby improving the S/N ratio of reproduction.

Photomagnetic recording medium

A method of forming a micro dot pattern by using an electron beam exposure apparatus which sets a minimum unit moving distance of an electron beam smaller than an electron beam diameter includes the steps of defining one of lattice points formed for every minimum unit moving distance of the electron beam as a reference position, and irradiating the electron beam on at least two lattice points within an area separated from the reference position by a distance smaller than the electron beam diameter in an equal exposure amount or different exposure amounts to form a pattern having a center at an exposure peak position in a sum of the plurality of exposure amounts, thereby forming the micro dot pattern having a center at a position other than the lattice points.

Method of forming micropattern

PROBLEM TO BE SOLVED: To develop a new use of tea blossoms with regard to an extract of the tea blossoms and a new saponin compound or its salt contained in the extract SOLUTION: A composition for absorption control of neutral fat, absorption control of sugar or protection of gastric mucous membrane that contains as an active ingredient at least one safe compound of the extract of the tea blossoms and the compounds of the invention contained in said extract, and a health food containing the above composition are provided COPYRIGHT: (C)2006,JPO&NCIPI

Ingredient of tea blossom and its use

PURPOSE:To enable any characteristic error level peculiar to each beam to be corrected by a method wherein a fine deflector deflecting individual small beam at fine level is provided near a planking electrode. CONSTITUTION:A fine deflector 4 is provided near a planking electrode 3 to calculate each beam correction level synchronized with beam scanning making reference to the coefficient for detecting the beam correction level preliminarily calculated and the deflected positions for correction by the fine deflector 4. Through these procedures, patterns without any distortion and disconnected parts can be formed with high precision.

Charged beam exposure device

PURPOSE:To provide green tea with characteristic aroma of flower and to produce green tea having improved flavor and commercial value, by blending green tea having completed ARACHA (just produced green tea but not yet classified) production process or finishing process with tea flower and redrying. CONSTITUTION:About 200g plucked and collected tea flower is added to 1kg tea leaves of green tea having completed ARACHA production process or finishing process. They are fully blended while stirring and allowed to stand for about 14-15hr as they are. In the operation, the green tea is provided with aroma and the tea leaves and the tea flower are redried at about 100 deg.C for about 30-40min to give the aimed tea.

Production of green tea

Sealing of crack or the like in pavement

PURPOSE:To produce a material for tea blended with roasted unpolished rice having good aroma and characteristic flavor, by blending a raw material which is in the production of a material for tea blended with roasted unpolished rice with petals or other natural or artificial spice so that the material is provided with aroma. CONSTITUTION:Unpolished rice is steamed, mixed with petals or other natural or artificial spice, stirred, allowed to stand for about 14-15hr so that a raw material in the production of a material for tea blended with roasted unpolished rice is sufficiently provided with aroma of petals or other natural aroma, dried and roasted.

Production of material for tea blended with roasted unpolished rice

PURPOSE:To increase the Kerr effect as well as the signal/noise ratio, by forming the magnetic/optical memory element with the transparent thin film and the MnBi film having the easy-magnetization axis vertical to the film surface formed on the substrate. CONSTITUTION:MnBi film 2 is formed on the lower surface of transparent thin film 1 through the vacuum depositing method and then adhered to the substrate functioning as glass disk 3 by the adhesive. As a result, the readout beams are condensed to film 2 through film 1 and by lens 4, and thus the information recorded on film 2 can be read with the well-known method. In that case, the Kerr rotating angle increases almost evenly up to about 1.1-1.5 deg. and in a wide range of the light wavelength.

Oota Kenji

Papers

Charged beam exposure device

Production of green tea

Sealing of crack or the like in pavement

Production of material for tea blended with roasted unpolished rice

Magnetic*optical memory element