P
P. Boucaud
Researcher at University of Paris
Publications - 1
Citations - 79
P. Boucaud is an academic researcher from University of Paris. The author has an hindex of 1, co-authored 1 publications receiving 79 citations.
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Growth and characterization of strain compensated Si1−x−y epitaxial layers
TL;DR: In this paper, a partially strain compensated, epitaxial layers of the ternary alloy SiGeC on (001) Si substrates were fabricated using a rapid thermal chemical vapor deposition reactor working at reduced pressure and at 650°C.