P
P.S. Chen
Publications - 1
P.S. Chen is an academic researcher. The author has co-authored 1 publications.
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Proceedings ArticleDOI
Thin relaxed SiGe layers for strained Si CMOS
TL;DR: In this article, a SiGe nanostructure buffer is proposed to help thin SiGe uniform layers to relax by introducing some dislocations networks, which reduces the thickness of the SiGe layer by 50 to 75%.