Showing papers by "Paul H. Holloway published in 1980"

Electron beam effects during analysis of glass thin films with auger electron spectroscopy

Abstract: Migration of sodium in thin films of soda-silica glass deposited on a stainless steel substrate has been studied. The amounts of charge trapping and local heating were a strong function of beam parameters for thin films. For example, the time required for the sodium Auger signal to decay to 50% of its initial value increased as the beam energy was increased or as the current density was decreased. The rearrangement of sodium due to charge trapping was calculated and compared to experimental data. The calculated and experimental data agree well and indicate that fields of ∼105 V cm−1 exist during analysis. The depth distribution of sodium indicates that either electrons or ion bombardment can cause sodium migration during analysis. The cross-section for electron-induced desorption was measured to be 3 × 10−20 cm2 for sodium in this glass, therefore it is only important at very high current densities.

Fundamentals and Applications of Auger Electron Spectroscopy

Abstract: Publisher Summary This chapter discusses the fundamentals of Auger Electron Spectroscopy (AES). The emission of Auger electrons results from the radiation less rearrangement of the electrons in an excited atom. The empirical methods of determining Auger energies use the single-ionization energies determined from X-rays or photoemission. The characteristics of AES are discussed. The energy distribution of the primary electrons after ionization is determined by the transition probability of the core electron to the unoccupied states above the Fermi level. While qualitative analysis by AES is sufficient for a vast majority of applications, semiquantitative and quantitative analysis is often desirable. It is relatively easy to quantify Auger data to an accuracy of a factor of four that shall be called semiquantitative analysis. In quantitative analysis, accuracy errors