Showing papers by "Paul R. Young published in 2002"

Fabrication, RF Characteristics and Mechanical Stability of Self-Assembled 3D Microwave Inductors

Abstract: We present a method for the fabrication of vertical inductors for radio-frequency and microwave applications. This process uses five levels of lithography and electroplating, with no substrate removal, high temperatures or serial process steps. Rotation of the inductors perpendicular to the substrate is achieved by surface tension driven self-assembly, giving separation from the substrate and therefore increasing substantially the Q and self-resonant frequencies. Meander and spiral air-bridged inductors of up to 5.5 nH are demonstrated. The Q of 2 nH inductors shows an increase from 4 to 20 after having undergone the self-assembly process. Mechanical sensitivity is evaluated through finite element modelling, and the maximum displacements indicated are below 10 nm for 1 g of loading. Mechanical resonance frequencies are found within the 6-15 kHz range. (C) 2002 Elsevier Science B.V. All rights reserved.

Rectangular Waveguide Filters Using Photoimageable Thick-film Processing

Abstract: Band-pass H-plane offset Rectangular Waveguide filters at W-Band (75-110GHz) and F-Band (90-140GHz) are presented. The filters are designed using multilayer thick-film processing with Alumina as a base. The process incorporates photoimageable thick-film paste for better precision and sharpness at the corners of the offsets. The filters do not require any tuning and are described with regard to their manufacture and measurement results. The centre frequencies are 85GHz and 105GHz and their relative bandwidths are ? 10%. The filters are de-embedded using a specially designed calibration set which uses the multiline TRL technique. Insertion loss of 5 dB and return loss less than 15 dB is measured for waveguide thickness of 18?m.