Showing papers by "Péter B. Barna published in 2012"
TL;DR: In this article, the initial phases of the ALD growth of ZnO have been examined and a new method for depositing ultrathin smooth polycrystalline films is presented.
Abstract: The initial phases of the ALD growth of ZnO have been examined. It is shown that ZnO exhibits an island-like growth on Si, layer-by-layer on GaN, whereas on sapphire, the growth mode can be tuned by the deposition temperature. A new method for depositing ultrathin smooth polycrystalline films is presented. The growth rates on different substrates and at different deposition temperatures were analyzed, and the possibility of epitaxial growth was also examined.
84 citations
TL;DR: In situ oxygen doping modifies both the morphology and texture of the TiN films as mentioned in this paper and it has been found that beyond 15% oxygen doping the columnar morphology is preserved however the texture is changed to the.
5 citations