Showing papers by "Peter R. Herman published in 1994"
Proceedings Article•
08 May 1994TL;DR: In this paper, surface-relief submicron gratings on semiconductor, quartz, and polymer materials are of interest in numerous applications such as distributed feedback lasers, wavelength division de-multi-plexers, holographic optical elements, surface acoustic wave directional-couplers, and physical and chemical sensors.
Abstract: Fabrication of surface-relief submicron gratings on semiconductor, quartz, and polymer materials is of interest in numerous applications such as distributed feedback lasers, wavelength division de-multi-plexers, holographic optical elements, surface acoustic wave directional-couplers, and physical and chemical sensors. Excimer lasers offer several advantages in patterning such gratings, their high fluence making possible single-step processing for high through-put and their short wavelength offering submicron line spacing.
7 citations
01 Feb 1994
TL;DR: In this article, a self-healing target was demonstrated for synchronous photo-pumping of extreme ultraviolet lasers. But the target was not a gold target, but a threaded, mercury-wetted copper rod rotating in a pool of mercury, which offers similar photoionization efficiency as gold targets, but without target-surface degradation.
Abstract: A self-healing target has been demonstrated for synchronous photo-pumping of extreme- ultraviolet lasers. The threaded, mercury-wetted copper rod, rotating in a pool of mercury, offers similar photoionization efficiency as gold targets, but without target-surface degradation. A gain coefficient of 1.4 cm-1 was obtained with mercury for the 1089 angstrom Xe2+ laser at a pump-laser intensity of 140 GW(DOT)cm-2, comparing favorably with results from gold targets.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
4 citations
TL;DR: In this paper, a self-healing mercury-wetted target was developed as a practical source of soft x-ray radiation for photoexciting extreme ultraviolet lasers, and a threaded rod, rotating in a pool of mercury, demonstrated a soft xray conversion efficiency similar to that of expendable gold-coated targets in synchronous photopumping of a photoionization Xe2+ laser at 109 nm.
Abstract: We have developed a self‐healing mercury‐wetted target as a practical source of soft x‐ray radiation for photoexciting extreme ultraviolet lasers. A threaded rod, rotating in a pool of mercury, demonstrates a soft x‐ray conversion efficiency similar to that of expendable gold‐coated targets in synchronous photopumping of a photoionization Xe2+ laser at 109 nm. Surfaces self‐heal or are continuously regenerated by rewetting, while mercury debris is removed by evaporation from the target chamber walls and optics. Long target lifetime and self‐cleaning performance of the new target system are attractive features in future high‐repetition‐rate, high‐throughput applications for photopumping of extreme ultraviolet or soft x‐ray lasers, and more generally as incoherent sources for soft x‐ray lithography and spectroscopy.
3 citations