An apparatus for in situ CMP endpoint detection is presented which includes a probe member for emitting and receiving light signals, a transparent plug mounted over the end of the probe, and a support member located about, and slidably engaged with, the outer circumference of the probe. In use, the plug is inserted into an opening in a polishing pad so that the top of the plug is recessed or coplanar with respect to the polishing surface of the pad and the support member is inserted into an opening in a platen such that a seal is formed between the platen and the support member. The probe member, plug, and/or support member may be disposable and replaceable either alone or in combination.

Method and apparatus for endpoint detection during chemical mechanical polishing

A method for the accurate positioning of a vehicle to be examined aerodynamically in a measurement position in a wind tunnel, in which it assumes an accurately predefined relative position in relation to the axis of the wind tunnel, the measurement object is supported in the measurement position, in a stable position on the floor or on balance standing points in the wind tunnel, by auxiliary supports, in the case of a motor vehicle via its wheels. Outside the wind tunnel, the measurement object is placed onto a measurement-object carrier that can be moved at least in the longitudinal direction of the measurement-object carrier and is aligned accurately with respect to the latter. The measurement-object carrier with the aligned measurement object is moved into the wind tunnel and stopped in the latter in an accurately predefined position. The measurement object is subsequently transferred to the measurement section of the wind tunnel only in the vertical direction and is locked, the measurement-object carrier being brought into a waiting position that does not either influence and/or interfere with the measurement.

Method and device for precisely positioning a vehicle in a wind tunnel

A liquid crystal display device having first and second substrates with a liquid crystal layer therebetween, a plurality of gate signal lines and a plurality of drain signal lines, a plurality of counter voltage signal lines, a plurality of pixel regions defined by neighboring gate signal lines and drain signal lines. and a counter electrode and a pixel electrode formed on the first substrate in each pixel region so as to enable an electric field to be formed therebetween. The counter electrode is of planar shape and made of a transparent conductor. The counter voltage signal line is made of metal and has a branch in each pixel region with the counter electrode being directly connected to the branch.

Liquid crystal display device comprising two counter voltage signal lines having two branches in each pixel region

Apparatus and method of monitoring for obstructions in a pipe or channel. The method comprising the steps of: (1) transmitting a wave into a first end of the pipe or channel from a transmitting transducer at a first known location relative to the pipe or channel, wherein the frequency f of the transmitted wave ( 13 ) varies in a predictable manner governed by the function f=f(t), where t is time; (2) noting the frequency f tr of the transmitted wave; (3) detecting any reflections of the transmitted wave travelling towards the first end of the pipe or channel at a receiving transducer at a second known location relative to the pipe or channel; (4) determining the frequency f rec of the reflected wave ( 14 ); (5) comparing the frequency f tr of the transmitted wave and the frequency f rec of the reflected wave, being transmitted from and being received by the respective transducers at the same time t; and 6) determining the distance L from the transmitting transducer to an obstruction and back to the receiving transducer from the difference Δf between the frequency f tr and the frequency f rec .

Apparatus and method for detecting obstructions in pipes or channels

A device for detecting a resonant frequency comprises a sound source, a switch, a mixer, and a sound meter The switch and mixer are capable of switching between a first state in which the switch and mixer output a measurement signal and a second state in which the switch and mixer output a synthesized signal containing the measurement signal and the signal output from a microphone The device detects the resonant frequency based on comparison between the first amplitude frequency characteristic measured in the first state and the second amplitude frequency characteristic measured in the second state

Method of detecting resonant frequency, method of selecting resonance frequency, and device for detecting resonant frequency sensor

A method and system for acoustic treatment performance testing in a free-ld acoustic environment is provided. A sound source directs a gated acoustic pulse at an acoustic treatment. Acoustic pressures of the gated acoustic pulse and reflected energy from the acoustic treatment are measured from a location approximately in-line with the source and the acoustic treatment. This measurement location is at least one-half the wavelength of the frequency of interest away from the source and is at least a distance equal to (t*c/2) away from the acoustic treatment where t is equal to the duration of the gated acoustic pulse and c is equal to the speed of sound in the free-field acoustic environment. The acoustic pressures of the gated acoustic pulse and reflected energy are compared as an indication of performance of the acoustic treatment at a frequency of interest.

Acoustic treatment performance testing

An assembly for positioning a measurement probe proximate a test body disposed for a fluid tunnel test includes a frame having a forward frame portion for attachment to a fluid flow tunnel fluid outlet, an aft frame portion aligned with the forward frame portion, and axial support members interconnecting the forward and aft frame portions. The assembly further includes a probe mount portion having a base slidably mounted on one or more of the axial support members, a probe supporting strut mounted on the base, and a probe mounted in the strut and movable in directions radially of the frame, and a probe moving member for moving the probe radially inwardly and outwardly of the frame portions.

Pierre J. Corriveau

Papers

Acoustic treatment performance testing

Assembly and method for positioning a measurement probe proximate a test body disposed for a fluid tunnel test