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R

R.B.W. Heng

Publications -  2
Citations -  73

R.B.W. Heng is an academic researcher. The author has contributed to research in topics: Capacitive sensing & Capacitive micromachined ultrasonic transducers. The author has an hindex of 1, co-authored 2 publications receiving 48 citations.

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Journal ArticleDOI

Capacitive Micromachined Ultrasonic Transducers: Technology and Application

TL;DR: This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer, and demonstrates in detail the collapse voltage design parameter of a cMUT membrane.
Proceedings ArticleDOI

Internal ringing effect in capacitive micromachined Ultrasonic Transducer

TL;DR: In this article, the effect of internally resonance at silicon substrate in capacitive micromachined ultrasonic transducers with 4.2 MHz was investigated using experimental and theoretical calculation.