R
R. Fabian W. Pease
Publications - 3
Citations - 197
R. Fabian W. Pease is an academic researcher. The author has contributed to research in topics: Image sensor & Photomask. The author has an hindex of 3, co-authored 3 publications receiving 197 citations.
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Patent
System and method for lithography process monitoring and control
TL;DR: In this article, a technique for measuring, inspecting, characterizing and/or evaluating optical lithographic equipment, methods, and materials used therewith, for example, photomasks is presented.
Patent
Characterisation of lithography apparatus
TL;DR: In this paper, the authors present a technique of measuring, inspecting, characterizing and/or evaluating optical lithographic equipment, methods, and materials used therewith, for example, photomasks.
Patent
System and method for monitoring and controlling lithography process
TL;DR: In this paper, the authors proposed a method to detect a prescribed wavelength of light emitted by a sensor array by exposing a portion of the active areas exposed by the corresponding holes, where the holes are arranged to make at least one hole on each active area of the sensor cells corresponding to the prescribed wavelength and exposing the remaining active areas.