R
Rajinder Dhindsa
Researcher at Lam Research
Publications - 179
Citations - 4731
Rajinder Dhindsa is an academic researcher from Lam Research. The author has contributed to research in topics: Plasma processing & Electrode. The author has an hindex of 35, co-authored 179 publications receiving 4731 citations. Previous affiliations of Rajinder Dhindsa include Applied Materials.
Papers
More filters
Patent
Gas distribution apparatus for semiconductor processing
TL;DR: In this paper, a gas distribution system for uniformly or non-uniformly distributing gas across the surface of a semiconductor substrate is described, which includes a support plate and a showerhead.
Patent
Gas distribution system having fast gas switching capabilities
TL;DR: In this paper, a gas distribution system for supplying different gas compositions to a chamber, such as a plasma processing chamber of a plasma-processing apparatus is provided, which can include a gas supply section, a flow control section and a switching section.
Patent
Dual Plasma Volume Processing Apparatus for Neutral/Ion Flux Control
TL;DR: In this paper, a semiconductor wafer processing apparatus is defined to transmit radiofrequency (RF) power to the first plasma generation volume, and a gas distribution unit disposed between the first and second plasma generation volumes.
Patent
Temperature control modules for showerhead electrode assemblies for plasma processing apparatuses
TL;DR: In this article, a temperature control module for a showerhead electrode assembly for a semiconductor material plasma processing chamber includes a heater plate adapted to be secured to a top surface of a top electrode of the shower head electrode assembly, and which supplies heat to the top electrode to control the temperature of the top electrodes.
Patent
Clamped showerhead electrode assembly
TL;DR: In this paper, an upper showerhead electrode assembly for a plasma reaction chamber used in semiconductor substrate processing is described, which includes an inner electrode mechanically attached to a backing plate by a clamp ring and an outer electrode attached to the backing plate with a series of spaced apart cam locks.