R
Ralph C. Wolf
Publications - 3
Citations - 161
Ralph C. Wolf is an academic researcher. The author has contributed to research in topics: Light beam & Diffraction. The author has an hindex of 3, co-authored 3 publications receiving 161 citations.
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Patent
Particle detection on a patterned or bare wafer surface
TL;DR: In this paper, a method and apparatus for predicting the number of contaminant particles in circuit area of a patterned semiconductor wafer having a number of reflective circuit areas is presented.
Patent
Adaptive spatial filter for surface inspection
TL;DR: In this paper, a planar array of individually addressable light valves is used as a spatial filter in an imaged Fourier plane of a diffraction pattern, with valves having a stripe geometry corresponding to positions of members of the diffraction patterns, blocking light from those members.
Patent
Thin film thickness monitor
Christopher F. Bevis,Armand P. Neukermans,Stanley Stokowski,Ralph C. Wolf,Matthew B. Lutzker +4 more
TL;DR: In this paper, a thin film thickness monitor using successive reflection of a polychromatic light beam off of reference thin film of variable optical thickness and a sample thin film whose thickness is to be determined, was presented.