In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting from describing the manufacturing process, we identify typical scheduling problems found in semiconductor manufacturing systems. We describe batch scheduling problems, parallel machine scheduling problems, job shop scheduling problems, scheduling problems with auxiliary resources, multiple orders per job scheduling problems, and scheduling problems related to cluster tools. We also present important solution techniques that are used to solve these scheduling problems by means of specific examples, and report on known implementations. Finally, we summarize some of the challenges in scheduling semiconductor manufacturing operations.

A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations

New multi-objective method to solve reentrant hybrid flow shop scheduling problem

Minimizing weighted tardiness of job-shop scheduling using a hybrid genetic algorithm

A hybrid simulated annealing algorithm based on a novel immune mechanism is proposed for the job shop scheduling problem with the objective of minimizing total weighted tardiness. The proposed immune procedure is built on the following fundamental idea: the bottleneck jobs existing in each scheduling instance generally constitute the key factors in the attempt to improve the quality of final schedules, and thus, the sequencing of these jobs needs more intensive optimization. To quantitatively describe the bottleneck job distribution, we design a fuzzy inference system for evaluating the bottleneck level (i.e. the criticality) of each job. By combining the immune procedure with a simulated annealing algorithm, we design a hybrid optimization algorithm which is subsequently tested on a number of job shop instances. Computational results for different-sized instances show that the proposed hybrid algorithm performs effectively and converges fast to satisfactory solutions.

Rene Schabacker

Papers

Genetic algorithm-based subproblem solution procedures for a modified shifting bottleneck heuristic for complex job shops