R
Robert A. Casella
Publications - 1
Citations - 22
Robert A. Casella is an academic researcher. The author has contributed to research in topics: Focused ion beam & Body orifice. The author has an hindex of 1, co-authored 1 publications receiving 22 citations.
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Particle beam shielding
TL;DR: In this article, an ion beam and an electron beam are used to travel toward a predetermined region of a substrate surface during sputter etching and imaging of insulating and other targets while preventing deflection of the electron beam by sources of stray electrostatic fields on the substrate surface.