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Robert D. Dible
Researcher at Lam Research
Publications - 2
Citations - 79
Robert D. Dible is an academic researcher from Lam Research. The author has contributed to research in topics: Phase (waves) & Amplitude. The author has an hindex of 1, co-authored 2 publications receiving 79 citations.
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Methods and apparatus for generating plasma
TL;DR: In this paper, a device for generating plasma for use in semiconductor fabrication, which includes a first radio frequency excitation source for outputting a first excitation current having a first phase and a first amplitude, was presented.