A metrology apparatus includes first ( 21 ) and second ( 22 ) radiation sources which generate first (iB 1 ) and second (iB 2 ) illumination beams of different spatial extent and/or angular range. One of the illumination beams is selected, e.g. according to the size of target to be measured. The beam selection can be made by a tillable mirror ( 254 ) at a back-projected substrate plane in a Kohler illumination setup.

Metrology Method and Apparatus, Lithographic Apparatus, and Device Manufacturing Method

A detecting device for detecting moving target vehicles from a moving host vehicle, comprising a first detector means mounted to the host vehicle and aligned to a stationary target area for generating at least a first output representative of the stationary target area at least at a time T1, a second detector means mounted to the host vehicle and aligned to the stationary target area for generating at least a second output representative of the stationary target area at least at a time T2, and a control system to receive the first and second outputs and to compare the first output at T1 to the second output at T2 to identify any differences between the outputs, whereby a target vehicle moving in the stationary target area may be detected.

Detecting device and method of using same

A method and system are presented for monitoring a field of regard. At least a part of a field of regard is imaged by concurrently collecting a plurality of light components propagating from a plurality of zones, respectively, located within the field of regard, a combined collected light beam is produced, and corresponding data is generated being indicative of a combined image of the at least part of the field of regard formed by the collected light components. This image data indicative of the combined image data is processed and analyzed, and if existence of a certain condition or event is identified in the image data, a corresponding control signal is generated.

Imaging system and method for use in monitoring a field of regard

A scanning laser ophthalmoscope incorporates adaptive optics to compensate for wavefront aberrations in the eye. Light from a light source is scanned onto the retina. Light reflected from the retina is detected for imaging and is also used for wavefront sensing. The sensed wavefront aberrations are used to control an adaptive optic device, such as a deformable mirror, disposed in the path of the light from the source in order to compensate for the aberrations.

Method and apparatus for using adaptive optics in a scanning laser ophthalmoscope

This invention provides a field of view expander (FOVE) removably attached to a vision system camera having an image sensor defining an image plane. In an embodiment the FOVE includes first and second mirrors that transmit light from a scene in respective first and second partial fields of view along first and second optical axes. Third and fourth mirrors respectively receive reflected light from the first and second mirrors. The third and fourth mirrors reflect the received light onto the image plane in a first strip and a second strip adjacent to the first strip. The first and second optical axes are approximately parallel and a first focused optical path length between the scene and the image plane and a second focused optical path between the image plane and the scene are approximately equal in length. The optical path can be rotated at a right angle in embodiments.

System and method for expansion of field of view in a vision system

Images of two fields of view of one or two scenes in a radiation sensor are generated by use of a single detector and common signal process circuitry. The two imaged fields of view, typically a narrow view and a wide view, are provided by two independent telescopes (18, 20), and are combined by use of a field-of-view switch (32) comprising a chopper wheel (34) or an optical switch in synchronized operation with a mirror scanner (22). The same field-of-view switch is employed in performing detector non-uniformity correction functions, such as automatic responsivity control and direct current restoration. Folding optics couples scanned radiation from the scanner to the switch. An additional field of view may be introduced by displacing a folding mirror of the folding optics. Also, a portion of a reflecting surface of the switch may be tilted to admit a reference beam of radiation useful in performing the functions of responsivity control and D.C. restoration.

Robert D. Schaefer

Papers

Multiple field of view sensor