R
Robert Doering
Researcher at Stanford University
Publications - 1
Citations - 572
Robert Doering is an academic researcher from Stanford University. The author has contributed to research in topics: Photolithography & Photomask. The author has an hindex of 1, co-authored 1 publications receiving 565 citations.
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Handbook of Semiconductor Manufacturing Technology
Robert Doering,Yoshio Nishi +1 more
TL;DR: A glossary of manufacturing terms acronyms used in semiconductor manufacturing standards and specifications units of measure and conversion tables useful constants can be found in this paper, along with a detailed overview of process control in-line metrology in-situ metrology yield modelling yield management electrical, physical and chemical characterization failure analysis.