scispace - formally typeset
R

Romel Hidayat

Researcher at Sejong University

Publications -  16
Citations -  86

Romel Hidayat is an academic researcher from Sejong University. The author has contributed to research in topics: Chemistry & Density functional theory. The author has an hindex of 3, co-authored 9 publications receiving 31 citations. Previous affiliations of Romel Hidayat include Bandung Institute of Technology & University of Groningen.

Papers
More filters
Journal ArticleDOI

Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules

TL;DR: In this article, the reaction mechanism of the initial fluorination process on the H-terminated Si and the OH-termined SiO2 surfaces with HF, CF4, CHF3, NF3, and ClF3 was modeled and simulated by density functional theory calculations using a slab surface model.
Journal ArticleDOI

Out-of-plane polarization in a layered manganese chloride hybrid

TL;DR: In this paper, the structural phase transitions of PEA2MnCl4 (PEA = phenethylamine) were investigated using temperature dependent single-crystal X-ray diffraction analysis, including the symmetry analysis of the observed space groups.
Journal ArticleDOI

Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride

TL;DR: In this article, the atomic layer deposition (ALD) of silicon nitride using silicon chloride was simulated by density functional theory (DFT) calculation to compare different nitriding agents.
Journal ArticleDOI

Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

TL;DR: In this article, a W4Cl12 cluster was created by optimizing the number of tungsten and chlorine atoms in the chlorine-passivated Tungsten cluster, and the results showed that the cluster can mimic the chlorides surface.
Journal ArticleDOI

Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study

TL;DR: In this paper, the authors studied heteroleptic Hf precursors with a linked amido-cyclopentadienyl ligand by density functional theory (DFT) calculation to enable high-temperature atomic layer deposition processes.